Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer
First Claim
1. A resistive material for a bolometer, in which at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb), and Sb is included at a concentration of 20 at. % or more.
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Accused Products
Abstract
A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
13 Citations
20 Claims
- 1. A resistive material for a bolometer, in which at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb), and Sb is included at a concentration of 20 at. % or more.
- 10. A bolometer for an infrared detector, which comprises a resistor in which at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb), and Sb is included at a concentration of 20 at. % or more.
- 18. A method of manufacturing a bolometer for an infrared detector, the method comprising forming a resistor in which at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb), and Sb is included at a concentration of 20 at. % or more, in the shape of a thin film using sputtering.
Specification