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Three dimensional inductor and transformer

  • US 8,143,952 B2
  • Filed: 10/08/2009
  • Issued: 03/27/2012
  • Est. Priority Date: 10/08/2009
  • Status: Active Grant
First Claim
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1. A three dimensional on-chip inductor comprising:

  • a substrate having a top side and a bottom side, the top side being opposite the bottom side;

    a plurality of segments of a first metal layer, the first metal layer being above the top side of the substrate;

    a plurality of segments of a second metal layer, the second metal layer being below the bottom side of the substrate;

    a first inductor input and a second inductor input; and

    a plurality of through silicon vias extending from the top side of the substrate to the bottom side of the substrate and coupling the plurality of segments of the first metal layer and the plurality of segments of the second metal layer to form a continuous, non-intersecting path between the first inductor input and the second inductor input.

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