Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
First Claim
1. An illumination optical apparatus which illuminates an illumination target surface on the basis of light from a light source, the illumination optical apparatus comprising:
- a first spatial light modulator arranged in an optical path of the illumination optical apparatus, said first spatial light modulator having a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled, and modulating light incident thereon to a first light with a first angle distribution;
a second spatial light modulator arranged at a position where the first light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged and postures of which each are individually controlled, and modulating the first light incident thereon to a second light with a second angle distribution; and
a distribution forming optical system arranged in an optical path between the second spatial light modulator and an illumination pupil of the illumination optical apparatus, said distribution forming optical system condensing the second light with the second angle distribution and forming a predetermined light intensity distribution on an illumination pupil of the illumination optical apparatus.
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Accused Products
Abstract
This invention relates to an illumination optical apparatus capable of forming a pupil intensity distribution of a desired shape and desired illuminance and, in turn, capable of realizing illumination conditions of great variety. The illumination optical apparatus has a spatial light modulation unit composed of a first spatial light modulator and a second spatial light modulator arranged in an order of incidence of light, and a distribution forming optical system to form a predetermined light intensity distribution on an illumination pupil, based on a beam having traveled via the first spatial light modulator and the second spatial light modulator. The first spatial light modulator has a plurality of first optical elements which are two-dimensionally arranged and postures of which each are individually controlled. The second spatial light modulator has a plurality of second optical elements which are two-dimensionally arranged in correspondence to the first optical elements and postures of which each are individually controlled.
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Citations
20 Claims
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1. An illumination optical apparatus which illuminates an illumination target surface on the basis of light from a light source, the illumination optical apparatus comprising:
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a first spatial light modulator arranged in an optical path of the illumination optical apparatus, said first spatial light modulator having a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled, and modulating light incident thereon to a first light with a first angle distribution; a second spatial light modulator arranged at a position where the first light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged and postures of which each are individually controlled, and modulating the first light incident thereon to a second light with a second angle distribution; and a distribution forming optical system arranged in an optical path between the second spatial light modulator and an illumination pupil of the illumination optical apparatus, said distribution forming optical system condensing the second light with the second angle distribution and forming a predetermined light intensity distribution on an illumination pupil of the illumination optical apparatus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A device manufacturing method comprising:
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providing an exposure apparatus including an illumination optical apparatus for illuminating a predetermined pattern to perform exposure of the predetermined pattern on a photosensitive substrate, the illumination optical apparatus comprising; a first spatial light modulator arranged in an optical path of the illumination optical apparatus, said first spatial light modulator having a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled, and modulating light incident thereon to a first light with a first angle distribution; a second spatial light modulator arranged at a position where the first light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged and postures of which each are individually controlled, and modulating the first light incident thereon to a second light with a second angle distribution; and a distribution forming optical system arranged in an optical path between the second spatial light modulator and an illumination pupil of the illumination optical apparatus, said distribution forming optical system condensing the second light with the second angle distribution and forming a predetermined light intensity distribution on an illumination pupil of the illumination optical apparatus; effecting the exposure of the predetermined pattern on the photosensitive substrate, using the exposure apparatus developing the photosensitive substrate onto which the predetermined pattern has been transferred, and then forming a mask layer in a shape corresponding to the predetermined pattern on a surface of the photosensitive substrate; and processing the surface of the photosensitive substrate through the mask layer. - View Dependent Claims (18)
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19. An illumination optical apparatus which illuminates an illumination target surface on the basis of light from a light source, the illumination optical apparatus comprising:
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a first spatial light modulator arranged in an optical path of the illumination optical apparatus, said first spatial light modulator having a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled, and modulating light incident thereon to a first light with a first angle distribution; a second spatial light modulator arranged at a position where the first light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged and postures of which each are individually controlled, and modulating the first light incident thereon to a second light with a second angle distribution; a distribution forming optical, system arranged in an optical path between the second spatial light modulator and an illumination pupil of the illumination optical apparatus, said distribution forming optical system condensing the second light with the second angle distribution and forming a predetermined light intensity distribution on an illumination pupil of the illumination optical apparatus; and a stop arranged in an optical path between the second light modulator and the distribution forming optical system and through which the second spatial light modulator is optically coupled to the distribution forming optical system. - View Dependent Claims (20)
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Specification