Method and device for multistate interferometric light modulation
First Claim
Patent Images
1. A light modulator, comprising:
- a movable reflector comprising an electrically conductive material, the movable reflector positioned between at least a first electrode and at least a second electrode, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than are the undriven position and the second driven position; and
at least a third electrode configured to drive the movable reflector to the second driven position;
wherein the first electrode is configured to drive the movable reflector to the first driven position;
wherein the second electrode is configured to modify a release threshold of the movable reflector; and
wherein the first driven position corresponds to a position of the moveable reflector in a first plane, wherein the second driven position corresponds to a position of the moveable reflector in a second plane, wherein the first plane is substantially parallel to the second plane, and wherein the first plane is in a different plane than the second plane.
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Abstract
A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.
41 Citations
45 Claims
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1. A light modulator, comprising:
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a movable reflector comprising an electrically conductive material, the movable reflector positioned between at least a first electrode and at least a second electrode, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than are the undriven position and the second driven position; and at least a third electrode configured to drive the movable reflector to the second driven position; wherein the first electrode is configured to drive the movable reflector to the first driven position; wherein the second electrode is configured to modify a release threshold of the movable reflector; and wherein the first driven position corresponds to a position of the moveable reflector in a first plane, wherein the second driven position corresponds to a position of the moveable reflector in a second plane, wherein the first plane is substantially parallel to the second plane, and wherein the first plane is in a different plane than the second plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of driving a MEMS device comprising at least a first electrode and at least a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least three positions therebetween, the method comprising:
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applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a first driven position; applying a second voltage potential difference between the second electrode and the movable electrode so as to modify a release threshold of the movable electrode; and applying a third voltage potential difference between at least a third electrode and the movable electrode so as to drive the movable electrode to a second driven position, wherein the first driven position corresponds to a position of the reflecting means in a first plane, wherein the second driven position corresponds to a position of the reflecting means in a second plane, wherein the first plane is substantially parallel to the second plane, and wherein the first plane is in a different plane than the second plane. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of driving a MEMS device comprising at least a first electrode and at least a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least three positions therebetween, the method comprising:
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applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a first driven position; applying a second voltage potential difference between the second electrode and the movable electrode so as to modify a release threshold of the movable electrode; and applying a third voltage potential difference between at least a third electrode and the movable electrode so as to drive the movable electrode to a second driven position, wherein the first driven position corresponds to a position of the moveable electrode in a first plane, wherein the second driven position corresponds to a position of the moveable electrode in a second plane, wherein the first plane is substantially parallel to the second plane, and wherein the first plane is in a different plane than the second plane. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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43. A method of fabricating a multistate light modulator, the method comprising:
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forming first, second, and third electrodes; and forming a movable reflector comprising an electrically conductive material, the movable reflector positioned between the first and second electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than are the undriven position and the second driven position, wherein the first electrode is configured to drive the movable reflector to the first driven position, wherein the second electrode is configured to modify a release threshold of the movable reflector, wherein the third electrode is configured to drive the movable reflector to the second driven position, and wherein the first driven position corresponds to a position of the moveable reflector in a first plane, wherein the second driven position corresponds to a position of the moveable reflector in a second plane, wherein the first plane is substantially parallel to the second plane, and wherein the first plane is in a different plane than the second plane. - View Dependent Claims (44, 45)
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Specification