Physical sensor
First Claim
1. A physical sensor for detecting a physical quantity comprising:
- a substrate including a silicon layer, an oxide film and a support layer, which are stacked in this order; and
a sensor portion includes a movable portion, a fixed portion and a lower electrode, wherein the movable portion and the fixed portion are disposed in the silicon layer, the movable portion includes a movable electrode, which is supported by a beam on the support layer, the fixed portion includes a fixed electrode facing the movable electrode, the lower electrode is disposed on the support layer, and the lower electrode faces the movable electrode via a space without the oxide film,wherein the physical sensor detects the physical quantity along with a first direction parallel to the substrate based on a capacitance between the movable electrode and the fixed electrode,wherein the physical sensor detects the physical quantity along with a second direction perpendicularly to the substrate based on a capacitance between the movable electrode and the lower electrode,wherein the beam includes a vertical beam displaceable along with the second direction and a horizontal beam displaceable along with the first direction,wherein the vertical beam has a thickness in the second direction, and the horizontal beam has a thickness in the second direction, andwherein the thickness of the vertical beam is smaller than the thickness of the horizontal beam.
1 Assignment
0 Petitions
Accused Products
Abstract
A physical sensor includes: a substrate having a silicon layer, an oxide film and a support layer; and a sensor portion having movable and fixed electrodes and a lower electrode. The movable electrode is supported by a beam on the support layer. The fixed electrode faces the movable electrode. The lower electrode is disposed on the support layer and faces the movable electrode. The physical sensor detects horizontal physical quantity based on a capacitance between the movable and fixed electrodes, and vertical physical quantity based on a capacitance between the movable and lower electrodes. The beam includes vertical and horizontal beams. The thickness of the vertical beam is smaller than the thickness of the horizontal beam.
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Citations
10 Claims
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1. A physical sensor for detecting a physical quantity comprising:
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a substrate including a silicon layer, an oxide film and a support layer, which are stacked in this order; and a sensor portion includes a movable portion, a fixed portion and a lower electrode, wherein the movable portion and the fixed portion are disposed in the silicon layer, the movable portion includes a movable electrode, which is supported by a beam on the support layer, the fixed portion includes a fixed electrode facing the movable electrode, the lower electrode is disposed on the support layer, and the lower electrode faces the movable electrode via a space without the oxide film, wherein the physical sensor detects the physical quantity along with a first direction parallel to the substrate based on a capacitance between the movable electrode and the fixed electrode, wherein the physical sensor detects the physical quantity along with a second direction perpendicularly to the substrate based on a capacitance between the movable electrode and the lower electrode, wherein the beam includes a vertical beam displaceable along with the second direction and a horizontal beam displaceable along with the first direction, wherein the vertical beam has a thickness in the second direction, and the horizontal beam has a thickness in the second direction, and wherein the thickness of the vertical beam is smaller than the thickness of the horizontal beam. - View Dependent Claims (2, 5, 8, 9, 10)
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3. A physical sensor for detecting a physical quantity comprising:
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a substrate including a silicon layer, an oxide film and a support layer, which are stacked in this order, wherein the silicon layer includes a lower layer, an insulation film and an upper layer, and the lower layer is disposed on the oxide film; and a sensor portion includes a movable portion, a fixed portion and a lower electrode, wherein the movable portion and the fixed portion are disposed in the upper layer of the silicon layer, the movable portion includes a movable electrode, which is supported by a beam on the support layer, the fixed portion includes a fixed electrode facing the movable electrode, the lower electrode is disposed on the support layer, and the lower electrode faces the movable electrode via a space without the oxide film, wherein the physical sensor detects the physical quantity along with a first direction parallel to the substrate based on a capacitance between the movable electrode and the fixed electrode, wherein the physical sensor detects the physical quantity along with a second direction perpendicularly to the substrate based on a capacitance between the movable electrode and the lower electrode, wherein the beam includes a vertical beam displaceable along with the second direction and a horizontal beam displaceable along with the first direction, wherein the vertical beam has a thickness in the second direction, and the horizontal beam has a thickness in the second direction, and wherein the thickness of the vertical beam is smaller than the thickness of the horizontal beam. - View Dependent Claims (4)
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6. A physical sensor for detecting a physical quantity comprising:
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a substrate including a silicon layer, an oxide film and a support layer, which are stacked in this order; and a sensor portion including a movable portion, a fixed portion and an upper electrode, wherein the movable portion and the fixed portion are disposed in the silicon layer, the movable portion includes a movable electrode, which is supported by a beam on the support layer, the fixed portion includes a fixed electrode facing the movable electrode, the upper electrode is spaced apart from the movable electrode by a predetermined distance, and the upper electrode is disposed opposite to the support layer, wherein the physical sensor detects the physical quantity along with a first direction parallel to the substrate based on a capacitance between the movable electrode and the fixed electrode, wherein the physical sensor detects the physical quantity along with a second direction perpendicularly to the substrate based on a capacitance between the movable electrode and the upper electrode, wherein the beam includes a vertical beam displaceable along with the second direction and a horizontal beam displaceable along with the first direction, wherein the vertical beam has a thickness in the second direction, and the horizontal beam has a thickness in the second direction, and wherein the thickness of the vertical beam is smaller than the thickness of the horizontal beam. - View Dependent Claims (7)
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Specification