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Methods and apparatus to modify a recipe process flow associated with a process control system during recipe execution

  • US 8,150,541 B2
  • Filed: 11/13/2007
  • Issued: 04/03/2012
  • Est. Priority Date: 11/13/2007
  • Status: Active Grant
First Claim
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1. A method to modify a recipe process flow during recipe execution, the method comprising:

  • executing a recipe using a plurality of manufacturing equipment resources; and

    before completion of execution of the recipe;

    receiving process flow change information indicative of a modification to a process flow of the recipe;

    determining, via a processor, whether a process step being executed by one of the manufacturing equipment resources can be stopped prematurely; and

    stopping the executing process step prematurely and modifying a process flow of the recipe based on the process flow change information in response to determining that the executing process step can be stopped prematurely.

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