Method for manufacturing connecting device for randomly connecting a number of transmitters and receivers

• US 8,151,444 B2
• Filed: 09/27/2007
• Issued: 04/10/2012
• Est. Priority Date: 09/29/2006
• Status: Expired due to Fees

• Current Assignee: Siemens AG
• Original Assignee: Siemens AG
• Inventors: Eckstein, Gerald, Frey, Alexander, Kühne, Ingo, Freudenberg, Oliver
• Primary Examiner(s): CAZAN, LIVIUS RADU
• Application Number:
  US12/159,015
• Publication Number:
  US 20080291938A1
• Time in Patent Office: 1,657 Days
• Field of Search: 296/22, 298/46, 298/47, 298/30, 200/181
• US Class Current: 29/622
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01H 63/33 Constructional details of co-ordinate-type selector switches not having relays at cross-points
• CPC Class Codes: H04Q 2213/1302 Relay switches
• CPC Class Codes: H04Q 2213/1304 Coordinate switches, crossbar, 4/2 with relays, coupling field
• CPC Class Codes: H04Q 2213/13305 Transistors, semiconductors in general
• CPC Class Codes: H04Q 2213/13322 Integrated circuits
• CPC Class Codes: H04Q 3/521 using semiconductors in the switching stages
• CPC Class Codes: Y10T 29/49105 Switch making
• CPC Class Codes: Y10T 29/49126 Assembling bases
• CPC Class Codes: Y10T 29/49156 with selective destruction of conductive paths

Abstract

A connection device for random connection of a first member of first transmission/reception units with a second number of second transmission/reception units has a switching matrix that includes a third number of controllable micromechanical switching elements that are respectively activatable to establish a connection between one of the first transmission/reception units and one of the second transmission/reception units. A control circuit selectively activates the respective micromechanical switching elements to selectively establish respective connections between the first number of first transmission/reception units and the second number of transmission/reception units.

Claims

1. A method for manufacturing a connection device for random connection of a first number of first transmission/reception units with a second number of second transmission/reception units, said connection device comprising a switching matrix comprising a third number of individually controllable micromechanical switching elements, and a control circuit for selective individual activation of the respective micromechanical switching elements, comprising the steps of:

preparing a first semiconductor wafer in which said control circuit is configured, said first semiconductor wafer having a top side, and producing at least one indentation, having dimensions corresponding to an area of a respective micromechanical switching element, in said top side of said first semiconductor wafer and, in said at least one indentation, forming an opening that uncovers a metal layer in said first semiconductor wafer and, after producing said indentation and forming said opening, forming a first electrically conductive layer on said top side of the first wafer and, in said first electrically conductive layer, forming, for each micromechanical switching element, at least one first electrode for electrostatic actuation thereof, a first electrode for a load circuit, and a first electrode for connection to the control circuit;

preparing a second semiconductor wafer and forming a second electrically conductive layer on a front side of the second wafer and, in said second electrically conductive layer, forming, for each micromechanical switching element, at least one second electrode for electrostatic actuation thereof, and at least one second electrode for said load circuit; and

connecting said first and second semiconductor wafers by establishing an electrical connection between said first electrode for connection to the control circuit and said second electrode for electrostatic actuation.

2. A method as claimed in claim 1 comprising planarizing said first wafer on said top side thereof before forming said first electrically conductive layer thereon.

3. A method as claimed in claim 1 comprising galvanically reinforcing the electrical connection of said first electrode to said control circuit.

4. A method as claimed in claim 1 comprising forming said second semiconductor wafer as an SOI substrate.

5. A method as claimed in claim 1 comprising applying an insulating layer on said second semiconductor wafer.

6. A method as claimed in claim 5 comprising applying said second electrically conductive layer on said second semiconductor wafer after applying said insulating layer, and structuring said insulating layer so that the subsequently applied second electrically conductive layer is below a surface of said insulation layer.

7. A method as claimed in claim 1 comprising forming said second electrodes by structuring said second electrically conductive layer.

8. A method as claimed in claim 1 comprising generating an extension of said second semiconductor wafer by forming a channel from said front side thereof into an insulation layer buried in said second semiconductor wafer.

9. A method as claimed in claim 8 comprising removing material from said second semiconductor wafer at a backside thereof by grinding or etching to allow said extension to be deflected upon an application of force thereto.