MEMS on-chip inertial navigation system with error correction
First Claim
1. An on-chip inertial navigation system assembly comprising:
- a semiconductor substrate;
a resonator gyroscope on the semiconductor substrate, the resonator gyroscope including a resonator formed of a first material; and
an oscillator on the semiconductor substrate, the oscillator including a resonator formed of a second material different from the first material.
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Abstract
An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used during fabrication. The use of MEMS components permits many of the components of a typical inertial navigation system to reside on a single chip. Because the components are in close proximity, the components can then be used to monitor the environmental changes of the chip, such as temperature and vibration, and correct for the resulting offsets of other components. This allows improved system performance even if the individual sensor components are not ideal.
160 Citations
35 Claims
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1. An on-chip inertial navigation system assembly comprising:
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a semiconductor substrate; a resonator gyroscope on the semiconductor substrate, the resonator gyroscope including a resonator formed of a first material; and an oscillator on the semiconductor substrate, the oscillator including a resonator formed of a second material different from the first material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An assembly, comprising:
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a semiconductor substrate; a gyroscope on the semiconductor substrate, the gyroscope including a first material; an oscillator on the semiconductor substrate, the oscillator including a resonator formed of a second material different from the first material; and an imaging array bonded to the substrate, wherein the gyroscope and resonator cooperate in providing image stabilization for images acquired by said imaging array.
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12. A method of error-correcting in an on-chip inertial navigation system apparatus having a semiconductor substrate;
- a gyroscope on the semiconductor substrate, the gyroscope including a first material; and
an oscillator on the semiconductor substrate, the oscillator including a resonator, the resonator including a second material different from the first material;
the method comprising;collecting motion data from the gyroscope; collecting timing data from the oscillator; adjusting the timing data based on the motion data; calculating temperature data based on the timing data; and correcting the gyroscope based on the temperature data. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
- a gyroscope on the semiconductor substrate, the gyroscope including a first material; and
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24. An on-chip inertial navigation system assembly comprising:
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a semiconductor substrate; a gyroscope on the semiconductor substrate, the gyroscope including a first material; and an oscillator on the semiconductor substrate, the oscillator including a resonator, the resonator including a second material different from the first material; means for collecting motion data from the gyroscope; means for collecting timing data from the oscillator; means for adjusting the timing data based on the motion data; means for calculating temperature data based on the timing data; and means for correcting the gyroscope based on the temperature data. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification