Ultra-miniature fiber-optic pressure sensor system and method of fabrication

• US 8,151,648 B2
• Filed: 08/03/2010
• Issued: 04/10/2012
• Est. Priority Date: 08/03/2009
• Status: Active Grant

• Current Assignee: University of Maryland
• Original Assignee: University of Maryland
• Inventors: Yu, Miao, Bae, Hyungdae, Zhang, Xuming
• Primary Examiner(s): ALLEN, ANDRE J
• Application Number:
  US12/849,436
• Publication Number:
  US 20110023617A1
• Time in Patent Office: 616 Days
• Field of Search: None
• US Class Current: 73/705
• CPC Class Codes: G01L 9/0079 with Fabry-Perot arrangements
• CPC Class Codes: G02B 6/262 Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence
• CPC Class Codes: Y10T 29/49 Method of mechanical manufacture

Abstract

Ultra-miniature surface-mountable Fabry-Perot pressure sensor is constructed on an optical fiber which utilizes a 45° angled fiber tip covered with a reflective layer which steers the optical axis of the fiber by 90°. The Fabry-Perot cavity is formed on the sidewall of the fiber and a polymer-metal composite diaphragm is formed on the top of the Fabry-Perot cavity to operate as a pressure transducer. The sensor exhibits a sufficient linearity over the broad pressure range with a high sensitivity. The sensitivity of the sensor may be tuned by controlling the thickness of the diaphragm. The sensor may be used in a wide range of applications, including reliable in vivo low invasive pressure measurements of biological fluids, single sensor systems, as well as integral spatial-division-multiplexing sensor networks. Methods of batch production of uniform device-to-device Fabry-Perot pressure sensors of co-axial and cross-axial configurations are presented.

Claims

1. A surface-mountable ultra-miniature fiber-optic pressure sensor system, comprising:

at least one sensing head, said at least one sensing head being formed on an optical fiber having an optical guide channel defined within sidewalls and extending between an input end and a tip end of said optical fiber, wherein said tip end of said optical fiber is formed with an end surface angled substantially at 45°

relative to an optical axis of said optical guide channel of said optical fiber and covered with a first reflective layer, wherein said reflective angled end surface redirects light traveling along said optical guide channel from said input end toward said tip end to impinge on said sidewall of said optical fiber at a predetermined location thereof; and

a Fabry-Perot cavity structure formed at said predetermined location at said sidewalls of said optical fiber;

wherein optical characteristics of an optical output signal emanating from the input end of said optical fiber correspond to a pressure applied to said Fabry-Perot cavity structure.

2. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 1, wherein said Fabry-Perot cavity structure includes:

a cavity confining layer formed on said sidewalls, said cavity confining layer having a cavity formed through the thickness thereof, and

a diaphragm formed on said cavity confining layer and covering a top of said cavity, said diaphragm including a polymer diaphragm layer and a reflective diaphragm layer covering said polymer diaphragm layer.

3. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 2, further comprising at least one additional polymer layer formed on said reflective diaphragm layer.

4. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 2, wherein said cavity confining layer is a photoresist layer.

5. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 2, wherein said cavity confining layer is a jacket of said optical fiber.

6. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 2, wherein said cavity confining layer is an UV-curable material deposited on said sidewalls of said optical fiber at said predetermined location thereof.

7. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 1, further comprising a substrate supporting said at least one sensing head.

8. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 7, further comprising at least one light source generating an optical input signal coupled to said input end of said optical fiber of said at least one sensing head, at least one light detector optically coupled to said at least one sensing head to detect said optical output signal emanating therefrom, and a signal processing unit coupled to said at least one light detector to determine said characteristics of said optical output signal.

9. The surface-mountable ultra-miniature fiber-optic pressure sensor system of claim 2, further comprising a second reflective layer formed on said sidewall at said predetermined location thereof, wherein said first and second reflective layers, and said reflective diaphragm layer are made from a metal material.

10. A method for manufacturing a surface-mountable ultra-miniature fiber-optic pressure sensor system, comprising the steps of:

fabricating at least one sensing head by;

(a). contouring a tip end of an optical fiber with an end surface angled at substantially 45°

relative to an optical guide channel defined by sidewalls of said optical fiber,

(b). depositing a first reflective layer on said end surface,

(c). inputting a light beam at an input end of said optical fiber, wherein said light beam travels from said input end toward said tip end of said optical fiber along said optical guide channel thereof and redirects at said reflective angled end surface toward a predetermined location at said sidewalls of said optical fiber, and

(d). forming a Fabry-Perot cavity structure at said predetermined location of said sidewalls of said optical fiber, said Fabry-Perot cavity structure having a cavity and a diaphragm covering a top of said cavity.

11. The method of claim 10, further comprising the steps of:

prior to said step (a), removing a fiber jacket from said optical fiber; and

prior to said step (c), covering said sidewalls with a second reflective layer; and

depositing a photoresist layer on said second reflective layer;

wherein in said step (c), said light beam is a UV light beam, and wherein in said step (d), said photoresist layer is exposed to said UV light beam traveling along said optical guide channel and redirected by said reflective angled end surface toward said sidewalls, thereby UV-patterning said photoresist layer at said predetermined location, and

removing said photoresist layer from said predetermined location, thereby forming said cavity of said Fabry-Perot cavity structure.

12. The method of claim 10, wherein in said step (c), said light beam is a laser beam, further comprising the steps of:

prior to said step (d), determining said predetermined location by sensing a laser light beam emanating through said sidewalls of said optical fiber,

in said step (d), forming said cavity of said Fabry-Perot cavity structure by exposing a fiber jacket to a material subtraction technique from outside of said fiber jacket to remove the fiber jacket material at said predetermined location, and

after said step (d), depositing a second reflective layer at least on said sidewalls defined within said cavity.

13. The method of claim 10, wherein in said step (c), said light beam is a laser beam, further comprising the steps of:

prior to said step (a), removing a fiber jacket from said optical fiber to expose said sidewalls thereof;

prior to said step (c), covering said sidewalls with a second reflective layer;

prior to said step (d), depositing a predetermined volume of a UV-curable material on said second reflective layer in proximity to said tip end of said optical fiber; and

in step (d), positioning a mold above said UV-curable material in alignment with said predetermined location, said mold having a shape opposite to a contour of said cavity,

lowering said mold through said UV-curable material to attain a contiguous contact with said second reflective layer,

curing said UV-curable material; and

removing said mold therefrom.

14. The method of claim 13, further comprising the steps of:

prior to the step of lowering said mold, finding an alignment of said mold with said predetermined location when said optical output signal corresponding to a laser light beam reflected from said mold reaches maximal power.

15. The method of claim 10, further comprising the steps of:

in said step (d), forming said diaphragm by covering the top of said cavity with a polymer diaphragm layer, and

covering said polymer diaphragm layer with a reflective diaphragm layer.

16. The method of claim 15, further comprising the steps of:

prior to covering said polymer diaphragm layer on the top of said cavity,

pre-forming said polymer diaphragm layer having a uniform thickness in a nanometer-scale range.

17. The method of claim 15, further comprising the step of:

tuning a sensitivity of said at least one sensing head by controlling a number of additional polymer layers covered on said reflective diaphragm layer.

18. A method of manufacturing a plurality of ultra-miniature fiber-optic pressure sensors, comprising the steps of:

removing a fiber jacket from an end area of each of a plurality of optical fibers to expose sidewalls thereof,

securing said plurality of optical fibers to a holding member in alignment each with the other,

polishing the tips of said plurality of optical fibers to form end surfaces angled at a predetermined angle relative to an optical guide channel of each optical fiber,

forming a cavity confining layer at a predetermined location of said plurality of optical fibers, said predetermined location including a location selected from a group consisting of;

said sidewalls of said optical fibers, said end surfaces of said optical fibers, and combinations of said sidewalls and said end surfaces, and

forming a Fabry-Perot cavity structure at said predetermined location by the steps of;

(a) removing a material of said cavity confining layer to form a cavity of predetermined dimensions through the thickness of said cavity confining layer,

(b) pre-forming a polymer diaphragm film of a uniform thickness,

(c) covering said pre-formed polymer film on tops of said cavities of said plurality of optical fibers, thereby forming a polymer diaphragm layer of each said Fabry-Perot cavity structure, and

(d) coating a reflective diaphragm layer on said polymer diaphragm layer.

19. The method of claim 18, further comprising the steps of:

in said step (b), placing a loop-shaped holder under a surface of a body of deionized water,

dispensing a predetermined amount of a UV-curable polymer on said body of deionized water to form a thin polymer film,

pre-curing said thin polymer film with UV-light, and

removing said loop-shaped holder from the deionized water, thereby removing said pre-cured thin polymer film.

20. The method of claim 18, wherein said predetermined angle is selected form a group consisting of 45°

and 90°

.