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IC card and booking-account system using the IC card

  • US 8,158,491 B2
  • Filed: 12/27/2010
  • Issued: 04/17/2012
  • Est. Priority Date: 12/27/2002
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing an article comprising:

  • forming a metal film over a substrate;

    forming a metal oxide film by oxidizing a surface of the metal film;

    selectively removing the metal film formed in an edge portion of the substrate;

    forming a base film over the metal oxide film;

    forming a semiconductor element over the base film; and

    separating the semiconductor element and the base film from the substrate by physical means.

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