Quantification of hydrophobic and hydrophilic properties of materials

• US 8,158,523 B2
• Filed: 09/04/2008
• Issued: 04/17/2012
• Est. Priority Date: 09/07/2007
• Status: Expired due to Fees

• Current Assignee: Katholieke Universiteit Leuven
• Original Assignee: IMEC International, Katholieke Universiteit Leuven
• Inventors: Urbanowicz, Adam Michal, Baklanov, Mikhaïl
• Primary Examiner(s): Norton, Nadine G
• Assistant Examiner(s): ANGADI, MAKI A
• Application Number:
  US12/204,165
• Publication Number:
  US 20090068768A1
• Time in Patent Office: 1,321 Days
• Field of Search: 438700-708, 216/37, 216/67
• US Class Current: 438/706
• CPC Class Codes: G01N 21/631 using photolysis and investigating photolysed fragments
• CPC Class Codes: G01N 21/71 thermally excited

Abstract

A non-destructive and simple analytical method is provided which allows in situ monitoring of plasma damage during the plasma processing such as resist stripping. If a low-k film is damaged during plasma processing, one of the reaction products is water, which is remained adsorbed onto the low-k film (into pores), if the temperature is lower than 100-150 C. A plasma (e.g. He) that emits high energy EUV photons (E>20 eV) which is able to destruct water molecules forming electronically excited oxygen atoms is used to detect the adsorbed water. The excited oxygen is detected from optical emission at 777 nm. Therefore, the higher the adsorbed water concentration (higher damage), a more intensive (oxygen) signal is detected. Therefore, intensity of oxygen signal is a measure of plasma damage in the previous strip step. The proposed analytical method can be performed in-situ immediately after plasma processing and most preferred the optical emission of oxygen radicals is monitored during the de-chucking step in the plasma chamber.

Claims

1. A method for quantifying at least one of a hydrophilic property and a hydrophobic property of a material, the method comprising:

exposing a material to a noble gas plasma, wherein the noble gas plasma emits at least one of Extreme Ultra Violet photons and Vacuum Ultra Violet photons having sufficient energy to cause photolysis of water molecules adsorbed by the material so as to release at least one of oxygen radicals, hydrogen radicals, and hydroxyl radicals;

detecting an amount of at least one of released oxygen radicals, released hydrogen radicals, and released hydroxyl radicals; and

quantifying at least one of a hydrophilic property and a hydrophobic property of the material based on the amount of at least one of the released oxygen radicals, the released hydrogen radicals, and the released hydroxyl radicals.

2. The method of claim 1, wherein detecting an amount of at least one of released oxygen radicals, released hydrogen radicals, and released hydroxyl radicals is performed by at least one method selected from the group consisting of optical emission spectroscopy, laser induced fluorescence, and mass spectrometry.

3. The method of claim 2, wherein detecting an amount of at least one of released oxygen radicals, released hydrogen radicals, and released hydroxyl radicals comprises detecting released oxygen radicals using optical emission spectroscopy at 777 nm.

4. The method of claim 1, wherein the method further comprises determining a degree of damage resulting from plasma processes performed on the material from the quantification of at least one of the hydrophilic property or hydrophobic property of the material.

5. The method of claim 1, wherein the method is performed in a reactive ion etching chamber using a He or Ar plasma.

6. The method of claim 1, wherein the method is performed “

in-situ”

.

7. The method of claim 1, wherein the method is performed “

ex-situ”

.

8. The method of claim 1, wherein the material is a porous material.

9. The method of claim 8, wherein the porous material is a low-k dielectric material having pores.

10. Use of the method of claim 1 for quantifying plasma damage of the material after etching of the material.

11. The method of claim 1, wherein the noble gas plasma consists essentially of noble gas plasma.

12. A method for quantifying plasma damage of a material after etching of that material, the method comprising:

exposing a plasma etched material to a noble gas plasma, wherein the noble gas plasma emits at least one of Extreme Ultra Violet photons and Vacuum Ultra Violet photons having sufficient energy to cause photolysis of water molecules adsorbed by the material so as to release at least one of oxygen radicals, hydrogen radicals, and hydroxyl radicals;

detecting an amount of at least one of released oxygen radicals, released hydrogen radicals, and released hydroxyl radicals;

quantifying at least one of a hydrophilic property and a hydrophobic property of the material based on the amount of at least one of the released oxygen radicals, the released hydrogen radicals, and the released hydroxyl radicals; and

using at least one of the quantified hydrophilic property and quantified hydrophobic property to quantify plasma damage to the material.

13. A method for detecting plasma damage in a low-k film, comprising:

providing a wafer having a low-k film deposited thereon;

subjecting the low-k film to plasma processing;

dechucking the wafer by exposure to a He plasma, wherein the He plasma emits at least one of extreme ultra violet or vacuum ultra violet photons, and wherein the photons cause photolysis of water molecules generated as a reaction product during plasma damage and adsorbed onto the low-k film, thereby releasing at least one radical selected from the group consisting of oxygen radicals, hydrogen radicals and hydroxyl radicals; and

measuring an intensity of radiation emitted at a wavelength characteristic of at least one of the radicals, wherein the intensity correlates with the at least one radical which correlates with an amount of water molecules present, wherein the amount of water molecules present correlates with a degree of plasma damage, wherein the wavelength for oxygen radicals is 777 nm, wherein the wavelength for hydrogen radicals is 656 nm, and wherein the wavelength for hydroxyl radicals is 309 nm.

14. The method of claim 13, wherein dechucking and measuring are conducted at a temperature of less than 150°

C.

15. The method of claim 13, wherein dechucking and measuring are conducted at a temperature of less than 100°

C.

16. The method of claim 13, wherein subjecting the low-k film to plasma processing is conducted at a temperature of from 20°

C. to 200°

C.

17. The method of claim 13, wherein the plasma processing is resist stripping.

18. The method of claim 13, wherein the water is adsorbed into pores of the low-k film.

19. The method of claim 13, comprising measuring an intensity of radiation emitted at a wavelength of 777 nm.

20. The method of claim 13, comprising measuring an intensity of radiation emitted at a wavelength of 656 nm.

21. The method of claim 13, comprising measuring an intensity of radiation emitted at a wavelength of 309 nm.

22. The method of claim 13, wherein the He plasma is generated under conditions of 400 W, 12 eV, 6 seconds, and a gas pressure of 20 mTorr.

23. The method of claim 13, wherein the He plasma is a low pressure plasma with a minimum power of approximately 100 Watt with no bias applied.