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Device manufacturing method, device manufacturing system, and measurement/inspection apparatus

  • US 8,159,650 B2
  • Filed: 09/05/2008
  • Issued: 04/17/2012
  • Est. Priority Date: 03/07/2006
  • Status: Active Grant
First Claim
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1. A device manufacturing method of manufacturing a device through a series of substrate processing that includes measurement/inspection processing to a substrate, the method comprising:

  • an acquisition process of acquiring at least one of information on the substrate and information on the series of substrate processing to the substrate;

    a selection process of selecting one measurement/inspection instrument that actually measures/inspects the substrate from among a plurality of measurement/inspection instruments that perform the same measurement/inspection processing, based on the information that has been acquired; and

    an adjustment process of adjusting at least one of a measurement/inspection condition and information on a measurement/inspection result of the measurement/inspection instrument that has been selected, based on the information that has been acquired.

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