Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same

• US 8,163,404 B2
• Filed: 10/29/2008
• Issued: 04/24/2012
• Est. Priority Date: 12/25/2007
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Cheng, Syh-Yuh, Lin, Chia-Hsin, Lin, Chin-Ching, Chiang, Mei-Ching
• Primary Examiner(s): McNeil, Jennifer
• Assistant Examiner(s): Katz, Vera
• Application Number:
  US12/260,466
• Publication Number:
  US 20090162697A1
• Time in Patent Office: 1,273 Days
• Field of Search: None
• US Class Current: 428/702
• CPC Class Codes: C23C 16/407 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: Y10T 428/12687 Pb- and Sn-base components: alternative to or next to each other
• CPC Class Codes: Y10T 428/12708 Sn-base component

Abstract

A chlorine, fluorine and lithium co-doped transparent conductive film is provided, including chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.

Claims

1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:

chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %, wherein the chlorine, fluorine and lithium co-doped tin oxides have a resistance of less that 5×

10<sup>−

4</sup> Ω

·

cm.

2. The chlorine, fluorine and lithium co-doped transparent conductive film as claimed in claim 1, wherein the chlorine, fluorine and lithium co-doped tin oxides have a visible light transmittance greater than 80% while a thickness thereof is about 100-150 nm.

3. The chlorine, fluorine and lithium co-doped transparent conductive film as claimed in claim 1, wherein the chlorine, fluorine and lithium co-doped tin oxides have a visible light transmittance greater than 70% while a thickness thereof is about 150-250 nm.