Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same
First Claim
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1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:
- chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %, wherein the chlorine, fluorine and lithium co-doped tin oxides have a resistance of less that 5×
10−
4 Ω
·
cm.
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Abstract
A chlorine, fluorine and lithium co-doped transparent conductive film is provided, including chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.
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3 Claims
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1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:
chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %, wherein the chlorine, fluorine and lithium co-doped tin oxides have a resistance of less that 5×
10−
4 Ω
·
cm.- View Dependent Claims (2, 3)
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