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Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same

  • US 8,163,404 B2
  • Filed: 10/29/2008
  • Issued: 04/24/2012
  • Est. Priority Date: 12/25/2007
  • Status: Active Grant
First Claim
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1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:

  • chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %, wherein the chlorine, fluorine and lithium co-doped tin oxides have a resistance of less that 5×

    10

    4
    Ω

    ·

    cm.

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