Monolithic capacitive transducer

• US 8,165,323 B2
• Filed: 11/28/2007
• Issued: 04/24/2012
• Est. Priority Date: 11/28/2006
• Status: Active Grant

• Current Assignee: Preciseley Microtechnology Corporation
• Original Assignee: Tiansheng Zhou
• Inventors: Zhou, Tiansheng
• Primary Examiner(s): DANG, PHUC T
• Application Number:
  US11/946,204
• Publication Number:
  US 20080123242A1
• Time in Patent Office: 1,609 Days
• Field of Search: 381/174, 381/176, 257/415, 257/419
• US Class Current: 381/174
• CPC Class Codes: H01G 5/011 Electrodes
• CPC Class Codes: H01G 5/14 due to longitudinal movement of electrodes
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/02 Loudspeakers H04R19/01 takes precedence
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 7/18 at the periphery
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A capacitive transducer includes a substrate having a first surface and a second surface. The first surface of the substrate defines a first plane. The substrate has a cavity with an interior peripheral edge. The cavity extends between the first surface and the second surface. A body is provided that has an exterior peripheral edge. The body is parallel to the first plane and at least partially blocking the cavity. The body is connected to the substrate by resilient hinges such that, upon the application of a force, the body moves perpendicular to the first plane. A first set of comb fingers is mounted to the substrate. The first set of comb fingers is connected to a first electrical connection. A second set of comb fingers is mounted to the body and extends past the exterior peripheral edge of the body. The second set of comb fingers is connected to a second electrical connection that is isolated from the first connection. The first set of comb fingers and the second set of comb finger are interdigitated such that as the body moves, the first set of comb fingers and the second set of comb finger maintain a relative spacing. The first set of comb fingers and the second set of comb fingers define a capacitance. The capacitance is related to the relative position of the first set of comb drive fingers and the second set of comb drive fingers.

Claims

1. A capacitive transducer, comprising:

a substrate having a first surface and a second surface, the first surface defining a first plane, the substrate having a cavity with an interior peripheral edge, the cavity extending between the first surface and the second surface;

a body having an exterior peripheral edge, the body being parallel to the first plane and at least partially blocking the cavity, the body being connected to the substrate by resilient hinges such that, upon the application of a force, the body moves perpendicular to the first plane;

a first set of comb fingers mounted to the substrate, the first set of comb fingers being connected to a first electrical connection;

a second set of comb fingers mounted to the body and extending past the exterior peripheral edge of the body, the second set of comb fingers being connected to a second electrical connection that is isolated from the first connection, the first set of comb fingers and the second set of comb finger being interdigitated such that as the body moves, the first set of comb fingers and the second set of comb finger maintain a relative spacing, the first set of comb fingers and the second set of comb fingers defining a capacitance, the capacitance being related to the relative position of the first set of comb drive fingers and the second set of comb drive fingers.

2. The capacitive transducer of claim 1, wherein the force is a pressure wave acting on the body.

3. The capacitive transducer of claim 1, wherein the force is an electrical signal applied between the first electrical connection and the second electrical connection.

4. The capacitive transducer of claim 1, wherein the force is an acceleration of the substrate having a component that is perpendicular to the first plane.

5. The capacitive transducer of claim 1, wherein the body is rectangular, the body having a first set of comb drives on at least two parallel edges of the body.

6. The capacitive transducer of claim 5, wherein the body has springs attached to each corner of the body.

7. The capacitive transducer of claim 1, wherein the springs are serpentine.

8. The capacitive transducer of claim 1, wherein the springs are attached to the substrate by anchors, each of the anchors, the springs, the body, and the second set of comb fingers being electrically conductive.

9. The capacitive transducer of claim 1, comprising more than one first set of comb fingers and more than one second set of comb fingers, each of the first set of comb fingers being electrically connected together and each of the second set of comb fingers being electrically connected together.

10. The capacitive transducer of claim 1, wherein the first set of comb fingers is taller than the second set of comb fingers.

11. The capacitive transducer of claim 1, wherein the second set of comb fingers is taller than the first set of comb fingers.

12. The capacitive transducer of claim 1, wherein the first set of comb fingers is offset from the second set of comb fingers in the direction of the movement of the body.

13. The capacitive transducer of claim 1, wherein the capacitance is also related to the relative position of the second set of comb fingers and the first surface of the substrate.

14. The capacitive transducer of claim 1, wherein the substrate is an n-type material and the first electrical connection and the second electrical connection are a p-type material, the first electrical connection and the second electrical connection being connected directly to the substrate.

15. The capacitive transducer of claim 1, wherein the body, the first set of comb fingers and electrical connections, the second set of comb fingers, the first electrical connection, the second electrical connection, and springs are made from n-type silicon, and substrate is made from n-type silicon.

16. The capacitive transducer of claim 1, wherein a dielectric layer is positioned between the first electrical connection and the second electrical connection.

17. The capacitive transducer of claim 1, wherein the first set of comb fingers are vertically offset from the second set of comb fingers.

18. The capacitive transduce of claim 1, wherein the substrate comprises a first layer of material, and the first and second sets of comb fingers and the body are formed from a second layer of material mounted to the substrate.

19. A capacitive transducer comprising:

a substrate having a first surface and a second surface, the first surface defining a first plane, the substrate having a cavity with an interior peripheral edge, the cavity extending between the first surface and the second surface;

a body having an exterior peripheral edge, the body being parallel to the first plane and at least partially blocking the cavity such that the exterior peripheral edge of the body is within the interior peripheral edge of the cavity, the body being connected to the substrate by resilient hinges such that, upon the application of a force, the body moves perpendicular to the first plane;

a first set of comb fingers mounted to the substrate, the first set of comb fingers being connected to a first electrical connection;

a second set of comb fingers mounted to the body and extending past the exterior peripheral edge of the body, the second set of comb fingers being connected to a second electrical connection that is isolated from the first connection, the first set of comb fingers and the second set of comb finger being interdigitated such that as the body moves, the first set of comb fingers and the second set of comb finger maintain a relative spacing, the first set of comb fingers and the second set of comb fingers defining a capacitance, the capacitance being related to the relative position of the first set of comb drive fingers and the second set of comb drive fingers.

20. A capacitive transducer comprising:

a substrate having a first surface and a second surface, the first surface defining a first plane, the substrate having a cavity with an interior peripheral edge, the cavity extending between the first surface and the second surface;

a body having an exterior peripheral edge, the body being parallel to the first plane, the exterior peripheral edge of the body extending past the interior peripheral edge of the cavity to block the cavity, the body being connected to the substrate by resilient hinges such that, upon the application of a force, the body moves perpendicular to the first plane;

a first set of comb fingers mounted to the substrate, the first set of comb fingers being connected to a first electrical connection;

a second set of comb fingers mounted to the body and extending past the exterior peripheral edge of the body, the second set of comb fingers being connected to a second electrical connection that is isolated from the first connection, the first set of comb fingers and the second set of comb finger being interdigitated such that as the body moves, the first set of comb fingers and the second set of comb finger maintain a relative spacing, the first set of comb fingers and the second set of comb fingers defining a capacitance, the capacitance being related to the relative position of the first set of comb drive fingers and the second set of comb drive fingers.

21. The capacitive transducer of claim 20, wherein a lightweight material is deposited on a surface of the body facing the cavity to restrict airflow.

22. The capacitive transducer of claim 20, wherein the first set of comb drive fingers and the second set of comb drive fingers are interdigitated sufficiently close to restrict airflow.