Method and apparatus for statistical identification of devices based on parametric data
First Claim
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1. A method of calculating maverick control limits, the method comprising:
- selecting at least one critical parameter;
importing at least one parametric data set associated with the at least one critical parameter into a density identification block of a maverick control platform;
identifying a probability density function exhibited by the at least one parametric data set;
removing outlier data from the at least one parametric data set;
determining, using a processor, maverick control limits for the at least one parametric data set; and
generating a disposition determination in response to the maverick control limits determined for the at least one parametric data set.
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Abstract
A method and apparatus is provided for the calculation of maverick control limits. The maverick control limit method selects the correct parameter(s) as critical parameters to be utilized by the maverick control limit method. Next, the maverick control limit method identifies the probability density function that is associated with the parametric data set(s) that are associated with the critical parameter(s). Next, abnormal data points within the measured parametric data set(s) are removed. Maverick control limits are then calculated to properly disposition semiconductor die into pass/fail categories.
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20 Claims
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1. A method of calculating maverick control limits, the method comprising:
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selecting at least one critical parameter; importing at least one parametric data set associated with the at least one critical parameter into a density identification block of a maverick control platform; identifying a probability density function exhibited by the at least one parametric data set; removing outlier data from the at least one parametric data set; determining, using a processor, maverick control limits for the at least one parametric data set; and generating a disposition determination in response to the maverick control limits determined for the at least one parametric data set. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A maverick control limit processing system, comprising:
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a processor adapted to generate maverick control limits for one or more parametric data sets, the processor being further adapted to perform functions including, selecting one or more critical parameters; importing one or more parametric data sets associated with the one or more critical parameters into a density identification block of the maverick control limit processing system; identifying a probability density function exhibited by the one or more parametric data sets; removing outlier data from the one or more parametric data sets; determining maverick control limits for the one or more parametric data sets; and generating a disposition determination in response to the maverick control limits determined for the one or more parametric data sets. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A method of calculating maverick control limits, the method comprising:
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selecting two critical parameters; importing two parametric data sets associated with the two critical parameters into a density identification block of a maverick control platform; partitioning one of the parametric data sets into a plurality of data segments; identifying a data set for each of the plurality of data segments; identifying a probability density function exhibited by each identified data set; removing outlier data from each identified data set; determining, using a processor, maverick control limits for each identified data set; fitting an equation that corresponds to each identified data set of the plurality of data segments; and generating a disposition determination in response to the fitted equation. - View Dependent Claims (18, 19, 20)
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Specification