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Drying furnace for coated film

  • US 8,167,611 B2
  • Filed: 08/22/2005
  • Issued: 05/01/2012
  • Est. Priority Date: 08/24/2004
  • Status: Expired due to Fees
First Claim
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1. A drying furnace for heating up a substrate having an upper surface provided with a coated film and drying the coated film, the drying furnace comprising:

  • a carrier port for the substrate which is formed on a side surface;

    heating means which heats and dries the coated film of the substrate; and

    feeding means which abuts against a lower surface of the substrate and moves an abutment position against the substrate during heating and drying of the coated film,wherein the feeding means is formed of a supporting pin which supports the lower surface of the substrate carried in from the carrier port, and a moving pin which moves vertically from a lower location to a higher location than the supporting pin by driving means and moves horizontally.

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