High voltage switching devices and process for forming same
First Claim
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1. A microelectronic device structure, comprising:
- (a) a foreign substrate;
(b) a nucleation buffer layer overlying said foreign substrate;
(c) a first gallium nitride layer overlying said nucleation buffer layer, said first GaN layer having a dopant concentration of not more than about 1×
1016/cm3;
(d) a second, conductive gallium nitride layer overlying said first gallium nitride layer;
(e) a third gallium nitride layer overlying said second, conductive gallium nitride layer, said third gallium nitride layer having a dopant concentration of not more than about 1×
1016/cm3; and
(f) at least one metal contact over said third gallium nitride layer, forming a metal-to-semiconductor junction therewith.
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Abstract
The present invention relates to various switching device structures including Schottky diode, P—N diode, and P—I—N diode, which are characterized by low defect density, low crack density, low pit density and sufficient thickness (>2.5 um) GaN layers of low dopant concentration (<1E16 cm−3) grown on a conductive GaN layer. The devices enable substantially higher breakdown voltage on hetero-epitaxial substrates (<2 KV) and extremely high breakdown voltage on homo-epitaxial substrates (>2 KV).
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24 Claims
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1. A microelectronic device structure, comprising:
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(a) a foreign substrate; (b) a nucleation buffer layer overlying said foreign substrate; (c) a first gallium nitride layer overlying said nucleation buffer layer, said first GaN layer having a dopant concentration of not more than about 1×
1016/cm3;(d) a second, conductive gallium nitride layer overlying said first gallium nitride layer; (e) a third gallium nitride layer overlying said second, conductive gallium nitride layer, said third gallium nitride layer having a dopant concentration of not more than about 1×
1016/cm3; and(f) at least one metal contact over said third gallium nitride layer, forming a metal-to-semiconductor junction therewith. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A microelectronic device structure, comprising:
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(a) a foreign substrate; (b) a nucleation buffer layer overlying said foreign substrate; (c) a first gallium nitride layer overlying said nucleation buffer layer, said first gallium nitride layer having a dopant concentration of not more than about 1×
1016/cm3;(d) a second gallium nitride layer of n-type conductivity, overlying said first gallium nitride layer; (e) a third gallium nitride layer overlying said second gallium nitride layer of n-type conductivity, said third gallium nitride layer having a dopant concentration of not more than about 1×
1016/cm3; and(f) a fourth gallium nitride layer of p-type conductivity, formed over said third gallium nitride layer; and (g) at least one metal contact overlying said fourth gallium nitride layer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification