Defect inspection apparatus and defect inspection method
First Claim
1. A defect inspection apparatus comprising:
- an ultrasonic wave probe;
an ultrasonic wave transmitting and receiving device configured to irradiate ultrasonic waves via the ultrasonic wave probe onto a surface of an inspection material on which a predetermined propagation medium has been provided, and to also receive as noise signals, ultrasonic waves that have been scattered by defects present in the interior of the inspection material;
a frequency spectrum calculation device configured to perform time division on the noise signals so as to divide them into time widths that correspond to positions in the depth direction of the inspection material, and calculates a frequency spectrum for each one of the time-divided noise signals; and
a defect distribution detection device configured to calculate values showing a level of defect progression at each of the positions in the thickness direction within the inspection material based on the frequency spectrums.
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Abstract
An object of the present invention is to quantitatively evaluate a distribution of defects which are generated within an inspection material. In order to achieve this object, the present invention provides a defect inspection apparatus comprising: an ultrasonic wave probe; an ultrasonic wave transmitting and receiving device that irradiates ultrasonic waves via the ultrasonic wave probe onto a surface of an inspection material on which a predetermined propagation medium has been provided, and that also receives as noise signals ultrasonic waves that have been scattered by defects present in the interior of the inspection material; a frequency spectrum calculation device that performs time division on the noise signals so as to divide them into time widths that correspond to positions in the depth direction of the inspection material, and calculates a frequency spectrum for each one of the time-divided noise signals; and a defect distribution detection device that, based on the frequency spectrums, calculates values showing a level of defect progression corresponding to a position in the thickness direction of the inspection material.
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Citations
12 Claims
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1. A defect inspection apparatus comprising:
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an ultrasonic wave probe; an ultrasonic wave transmitting and receiving device configured to irradiate ultrasonic waves via the ultrasonic wave probe onto a surface of an inspection material on which a predetermined propagation medium has been provided, and to also receive as noise signals, ultrasonic waves that have been scattered by defects present in the interior of the inspection material; a frequency spectrum calculation device configured to perform time division on the noise signals so as to divide them into time widths that correspond to positions in the depth direction of the inspection material, and calculates a frequency spectrum for each one of the time-divided noise signals; and a defect distribution detection device configured to calculate values showing a level of defect progression at each of the positions in the thickness direction within the inspection material based on the frequency spectrums. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A defect inspection method comprising:
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irradiating, using an ultrasonic wave probe, ultrasonic waves onto a surface of an inspection material via a predetermined propagation medium; detecting, using an ultrasonic wave transmitting and receiving device, ultrasonic waves that have been scattered by defects present in the interior of the inspection material as noise signals; performing, using a frequency spectrum calculation device performs time division on the detected noise signals so as to divide them into time widths that correspond to positions in the depth direction of the inspection material; calculating, using the frequency spectrum calculation device, a frequency spectrum for each one of the time-divided noise signals; and calculating, using a defect distribution detection device, values showing a level of defect progression at each of the positions in the thickness direction within the inspection material based on the frequency spectrums. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification