Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- a supporting substrate;
a detecting portion configured to be supported by the supporting substrate movably in at least a free direction;
a displacement detecting portion configured to detect a displacement of the detecting portion in the free direction;
a first driving portion configured to excite a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a first axis; and
a second driving portion configured to excite a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a second axis different from the first axis,wherein the second driving portion excites the second reference oscillation so that the second Coriolis'"'"' force is separable from the first Coriolis'"'"' force, and the angular velocity sensor further comprises a controlling portion configured to separate a signal detected by the displacement detecting portion into two signals which correspond to displacements of the detecting portion caused by the first Coriolis'"'"' force and the second Coriolis'"'"' force, respectively, and thereby to acquire angular velocities about the first axis and the second axis.
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Accused Products
Abstract
An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a second axis.
23 Citations
11 Claims
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1. An angular velocity sensor comprising:
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a supporting substrate; a detecting portion configured to be supported by the supporting substrate movably in at least a free direction; a displacement detecting portion configured to detect a displacement of the detecting portion in the free direction; a first driving portion configured to excite a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a first axis; and a second driving portion configured to excite a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a second axis different from the first axis, wherein the second driving portion excites the second reference oscillation so that the second Coriolis'"'"' force is separable from the first Coriolis'"'"' force, and the angular velocity sensor further comprises a controlling portion configured to separate a signal detected by the displacement detecting portion into two signals which correspond to displacements of the detecting portion caused by the first Coriolis'"'"' force and the second Coriolis'"'"' force, respectively, and thereby to acquire angular velocities about the first axis and the second axis. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An angular velocity sensor comprising:
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a supporting substrate; a detecting portion configured to be supported by the supporting substrate movably in at least a free direction; a displacement detecting portion configured to detect a displacement of the detecting portion in the free direction; a first driving portion configured to excite a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a first axis; a second driving portion configured to excite a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis'"'"' force in the free direction is generated in response to an angular velocity about a second axis different from the first axis wherein the detecting portion includes a first mass portion supported movably in the direction of a third axis different from the first axis and the second axis and arranged on the first axis, and a second mass portion supported movably in the direction of the third axis and arranged on the second axis, and the free direction of the detecting portion is a tangential direction about the third axis. - View Dependent Claims (8, 9, 10, 11)
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Specification