Method for fabricating a long-range ordered periodic array of nano-features, and articles comprising same

• US 8,178,165 B2
• Filed: 01/23/2006
• Issued: 05/15/2012
• Est. Priority Date: 01/21/2005
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Jin, Sungho
• Primary Examiner(s): Empie, Nathan
• Assistant Examiner(s): Jiang, Lisha
• Application Number:
  US11/814,338
• Publication Number:
  US 20080260941A1
• Time in Patent Office: 2,304 Days
• Field of Search: 427/256, 427/287, 427/541, 427/542, 427/532, 427/346, 427/347, 977/855, 977/858
• US Class Current: 427/287
• CPC Class Codes: B01J 23/40 of the platinum group metals
• CPC Class Codes: B01J 35/23 in a colloidal state
• CPC Class Codes: B01J 37/0009 Use of binding agents; Moulding; Pressing; Powdering; Granulating; Addition of materials ameliorating the mechanical properties of the product catalyst
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G06N 10/00 Quantum computing, i.e. information processing based on quantum-mechanical phenomena
• CPC Class Codes: G11B 5/855 Coating only part of a support with a magnetic layer
• CPC Class Codes: H01F 1/009 bidimensional, e.g. nanoscale period nanomagnet arrays H01F10/007 takes precedence
• CPC Class Codes: H01F 1/405 of IV type, e.g. Ge1-xMnx
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/855 for manufacture of nanostructure
• CPC Class Codes: Y10S 977/858 including positioning/mounting nanostructure

Abstract

A long range, periodically ordered array of discrete nano-features (10), such as nano-islands, nano-particles, nano-wires, non-tubes, nano-pores, nano-composition-variations, and nano-device-components, are fabricated by propagation of a self-assembling array or nucleation and growth of periodically aligned nano-features. The propagation may be induced by a laterally or circularly moving heat source, a stationary heat source arranged at an edge of the material to be patterned (12), or a series of sequentially activated heaters or electrodes. Advantageously, the long-range periodic array of nano-features (10) may be utilized as a nano-mask or nano-implant master pattern for nano-fabrication of other nano-structures. In addition, the inventive long-range, periodically ordered arrays of nano-features are useful in a variety of nanoscale applications such as addressable memories or logic devices, ultra-high-density magnetic recording media, magnetic sensors, photonic devices, quantum computing devices, quantum luminescent devices, and efficient catalytic devices.

Claims

1. A nanoscale patterning method, comprising:

disposing a material to be patterned on a substrate, wherein the material comprises an ordered region of periodically arranged non-features; and

moving a heat source relative to the material at a non-uniform sweeping speed to induce an expansion of the ordered region, thereby patterning the material with a long-range ordered periodic array of nano-features.

2. A nanoscale electrochemical patterning method, comprising the steps of:

disposing an anode material to be patterned on a substrate;

moving a narrow area cathode actuator in a sweeping motion along the anode material to produce a plurality of periodically aligned shallow seed anodization spots in the anode material; and

exposing the anode material to a broad area cathode actuator to propagate the shallow seed anodization spots deeper into the substrate to form a long-range periodic array of deep nano-pores.

3. A nanoscale patterning method, comprising:

applying a layer of diblock copolymer solution to a substrate, wherein the diblock copolymer solution comprises a pair of phase-separated, self-assembling polymers diluted in a solvent; and

causing a temperature gradient from a stationary heat source arranged at an edge of the diblock copolymer layer to evaporate the solvent, thereby allowing the phase-separated polymers to assemble into a long-range ordered periodic array of nano-rods.

4. A nanoscale electrochemical patterning method, comprising:

disposing an anode material to be patterned on a substrate;

laterally moving a cathode actuator relative to the anode material at a substantially constant sweeping speed to induce a propagating nucleation and growth of periodically aligned nano-pores; and

forming a long-range ordered periodic array of nano-pores in the anode material.

5. A nanoscale electrochemical patterning method, comprising:

disposing an anode material to be patterned on a substrate;

circularly moving a cathode actuator relative to the anode material at a constant sweeping speed to induce a propagating nucleation and growth of periodically aligned nano-pores; and

forming a long-range ordered periodic array of nano-pores in the anode material.

6. A nanoscale electrochemical patterning method, comprising:

disposing an anode material to be patterned on a substrate;

sequentially activating a series of stationary cathode actuators arranged above the anode material to be patterned to induce a propagating nucleation and growth of periodically aligned nano-pores; and

forming a long-range ordered periodic array of nano-pores in the anode material.

7. A nanoscale electrochemical patterning method, comprising:

disposing an anode material to be patterned on a substrate;

moving a cathode actuator relative to the anode material at a substantially non-uniform sweeping speed to induce a propagating nucleation and growth of periodically aligned nano-pores; and

forming a long-range ordered periodic array of nano-pores in the anode material.

8. A nanoscale patterning method, comprising:

coating a colloidal solution on a substrate, wherein the colloidal solution comprises a plurality of self-assembling nano-particles and a surfactant diluted in a solvent; and

moving a heat source relative to the colloidal solution at a substantially non-uniform sweeping speed to evaporate the solvent, thereby allowing the plurality of self-assembling nano-particles to assemble into a long-range ordered periodic array of nano-features.