×

Exposure system, method of testing exposure apparatus, and method of manufacturing device

  • US 8,180,473 B2
  • Filed: 03/23/2010
  • Issued: 05/15/2012
  • Est. Priority Date: 03/25/2009
  • Status: Active Grant
First Claim
Patent Images

1. An exposure system configured to update control software installed on an exposure apparatus to new control software, the system comprising:

  • at least one exposure apparatus;

    a simulator configured to test an operation of said exposure apparatus;

    an output unit configured to output configuration information of said exposure apparatus, which includes information representing a temporal change of said exposure apparatus;

    a reflecting unit configured to reflect the temporal change of said exposure apparatus on said simulator based on the configuration information output from said output unit; and

    an updating unit configured to update control software installed on said simulator to new control software.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×