System and method for automated customizable error diagnostics
First Claim
1. A method of semiconductor manufacturing, comprising:
- providing a reactor system having a system controller configured to control an external device controller, the external device controller configured to control an associated external device;
monitoring for an error condition signal from the external device controller, the error condition signal indicative of the occurrence of an error condition in the external device;
automatically transmitting instructions from the system controller to the external device controller to execute diagnostic functions corresponding to the error condition signal upon detection of the error condition signal, thereby gathering a data set from the external device corresponding to the error condition detected;
automatically gathering the data set from the external device after transmitting the instructions and during execution of the diagnostic functions, wherein monitoring for the error condition signal is performed without the system controller gathering the data set from the external device; and
subsequently automatically executing error handling routines,wherein, after an error condition is detected and before executing diagnostic functions, the external device controller stops the associated external device from performing tasks that alter data.
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Abstract
A system and method of automated customizable error diagnostics is provided for use with industrial apparatus, such as semiconductor manufacturing apparatus. An external device, such as a robot, is provided with its own low level controller and a high level controller is provided to send instructions to the low level controller. The high level controller is programmed to perform automated customizable error diagnostics to diagnose errors in the external device. The high level controller monitors the occurrence of error conditions in the external device and executes a list of diagnostic commands based upon a detected error condition. Data concerning the error condition is automatically gathered to diagnose the cause of the error, before the external device executes its own error handling routines. In some embodiments, an editor is provided to edit and customize the diagnostic commands and a viewer is provided to allow diagnostic data to be viewed.
41 Citations
25 Claims
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1. A method of semiconductor manufacturing, comprising:
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providing a reactor system having a system controller configured to control an external device controller, the external device controller configured to control an associated external device; monitoring for an error condition signal from the external device controller, the error condition signal indicative of the occurrence of an error condition in the external device; automatically transmitting instructions from the system controller to the external device controller to execute diagnostic functions corresponding to the error condition signal upon detection of the error condition signal, thereby gathering a data set from the external device corresponding to the error condition detected; automatically gathering the data set from the external device after transmitting the instructions and during execution of the diagnostic functions, wherein monitoring for the error condition signal is performed without the system controller gathering the data set from the external device; and subsequently automatically executing error handling routines, wherein, after an error condition is detected and before executing diagnostic functions, the external device controller stops the associated external device from performing tasks that alter data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for semiconductor manufacturing, comprising:
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providing a semiconductor process tool with an associated controller, the associated controller configured to control the process tool and programmed to detect an error condition in the process tool and execute error handling routines after detecting an error condition; providing a higher level controller in communication with the associated controller, the higher level controller configured to gather diagnostic data from the associated controller and to control the process tool by transmitting instructions to the associated controller; monitoring for an error condition in the process tool without the higher level controller gathering a set of diagnostic data for the error condition from the associated controller; providing diagnostic commands from the higher level controller to the associated controller after detecting the error condition in the process tool, wherein, after the error condition is detected and before providing diagnostic commands, the associated controller stops the semiconductor processing tool from performing tasks that alter data; collecting the set of diagnostic data from the associated controller after providing diagnostic commands; and subsequently executing the error handling routines. - View Dependent Claims (12)
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13. A reactor system for semiconductor manufacturing, comprising:
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an external device and an associated controller configured to control the external device; and a system controller programmed to; control one or more lower level controllers including the associated controller; detect error condition signals from the associated controller, the error condition signals indicative of the occurrence of error conditions in the external device; automatically transmit diagnostic commands to the associated controller after detecting an error condition signal; and automatically retrieve a set of diagnostic data for the error condition signal after automatically transmitting the diagnostic commands, wherein detection of the error condition signal occurs without the system controller gathering the set of diagnostic data from the associated controller, wherein, after the error condition is detected and before transmitting diagnostic functions, the external device controller is configured to stop the associated external device from performing tasks that alter data. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification