Yaw rate sensor using surface acoustic wave
First Claim
1. A yaw rate sensor of a surface acoustic wave, comprising:
- a substrate;
an exciting electrode that transmits a surface acoustic wave through a surface of the substrate to generate a standing wave from the surface acoustic wave in an area of the surface of the substrate;
a plurality of perturbative weights, disposed on the area of the surface of the substrate in which the standing wave is formed, which is oscillated by the standing wave on the substrate; and
a detecting unit that is formed for the plurality of perturbative weights on the substrate in a direction orthogonal to a propagation direction of the surface acoustic wave, which detects an acoustic wave which is generated based on a Coriolis force induced in response to a yaw applied to the plurality of perturbative weights, whereinthe exciting electrode, the plurality of perturbative weights, and the detecting unit are, respectively, line-symmetric with respect to a driving axis which is a straight line extending along the propagation direction of the surface acoustic wave and passes through a center position of the plurality of perturbative weights.
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Abstract
A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate in a propagation direction. The weights are oscillated by the waves and excite a second surface acoustic wave, transmitted through the surface of the substrate in a detection direction orthogonal to the propagation direction, in response to a yaw applied to the weights. The detecting electrodes measure an intensity of the second surface acoustic wave to detect the yaw rate. The sets of exciting electrodes are symmetrically placed with respect to a driving axis extending straight along the propagation direction. The group of weights is symmetric with respect to the driving axis.
8 Citations
23 Claims
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1. A yaw rate sensor of a surface acoustic wave, comprising:
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a substrate; an exciting electrode that transmits a surface acoustic wave through a surface of the substrate to generate a standing wave from the surface acoustic wave in an area of the surface of the substrate; a plurality of perturbative weights, disposed on the area of the surface of the substrate in which the standing wave is formed, which is oscillated by the standing wave on the substrate; and a detecting unit that is formed for the plurality of perturbative weights on the substrate in a direction orthogonal to a propagation direction of the surface acoustic wave, which detects an acoustic wave which is generated based on a Coriolis force induced in response to a yaw applied to the plurality of perturbative weights, wherein the exciting electrode, the plurality of perturbative weights, and the detecting unit are, respectively, line-symmetric with respect to a driving axis which is a straight line extending along the propagation direction of the surface acoustic wave and passes through a center position of the plurality of perturbative weights. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification
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- Resources
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Current AssigneeDENSO Corporation
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Original AssigneeDENSO Corporation
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InventorsKano, Kazuhiko, Teshigahara, Akihiko, Arakawa, Kazuki
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Primary Examiner(s)Noori, Max
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Application NumberUS12/292,709Publication NumberTime in Patent Office1,274 DaysField of Search735033-50404US Class Current73/504.01CPC Class CodesG01C 19/5698 using acoustic waves, e.g. ...
