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Ultrathin porous nanoscale membranes, methods of making, and uses thereof

  • US 8,182,590 B2
  • Filed: 05/01/2006
  • Issued: 05/22/2012
  • Est. Priority Date: 04/29/2005
  • Status: Active Grant
First Claim
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1. A nanoporous membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, wherein the membrane comprises nanocrystalline silicon and has a surface roughness of less than 1 nm on both sides thereof, wherein said nanoporous membrane is prepared according to a process comprising:

  • applying a nanoscale silicon film to one side of a substrate;

    forming a passage through the substrate, thereby exposing the film on both sides thereof to form a membrane; and

    annealing the silicon at a temperature effective to convert the silicon into a nanocrystalline form, thereby forming a plurality of randomly spaced pores in the nanoporous membrane.

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