Nitride-based semiconductor light emitting device and method of manufacturing the same
First Claim
1. A method of manufacturing a nitride-based semiconductor light emitting device, the method comprising sequentially forming an n-clad layer, an active layer, and a p-clad layer on a substrate, wherein the forming of the n-clad layer comprises:
- forming a first clad layer on the substrate;
forming a light transmission material layer on an upper surface of the first clad layer;
patterning the light transmission material layer to form a light extraction layer composed of an array of a plurality of nano-posts and diffracting or/and scattering light generated in the active layer; and
forming a second clad layer for embedding the light extraction layer on the first clad layer,wherein the first clad layer and the second clad layer are formed of substantially the same material,wherein the plurality of nano-posts are wholly encompassed by the substantially same material forming the first and second clad layers.
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Abstract
A nitride-based semiconductor light emitting device having an improved structure in which light extraction efficiency is improved and a method of manufacturing the same are provided. The nitride-based semiconductor light emitting device comprises an n-clad layer, an active layer, and a p-clad layer, which are sequentially stacked on a substrate, wherein the n-clad layer comprises a first clad layer, a second clad layer, and a light extraction layer interposed between the first clad layer and the second clad layer and composed of an array of a plurality of nano-posts, the light extraction layer diffracting or/and scattering light generated in the active layer.
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Citations
13 Claims
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1. A method of manufacturing a nitride-based semiconductor light emitting device, the method comprising sequentially forming an n-clad layer, an active layer, and a p-clad layer on a substrate, wherein the forming of the n-clad layer comprises:
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forming a first clad layer on the substrate; forming a light transmission material layer on an upper surface of the first clad layer; patterning the light transmission material layer to form a light extraction layer composed of an array of a plurality of nano-posts and diffracting or/and scattering light generated in the active layer; and forming a second clad layer for embedding the light extraction layer on the first clad layer, wherein the first clad layer and the second clad layer are formed of substantially the same material, wherein the plurality of nano-posts are wholly encompassed by the substantially same material forming the first and second clad layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification