Accelerometer with over-travel stop structure
First Claim
1. A transducer adapted to sense acceleration comprising:
- a substrate;
a proof mass positioned in spaced apart relationship above a surface of said substrate;
at least one compliant member coupled to said proof mass, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a sense direction;
multiple proof mass anchors interconnecting said at least one compliant member with said surface, each of said multiple proof mass anchors being positioned on said surface at a perimeter of an anchor attach area in said sense direction, wherein separate locations of said proof mass anchors on said substrate define a centerline of said anchor attach area between said proof mass anchors that is perpendicular to said sense direction; and
an over-travel stop structure having a stop anchor coupled to said substrate at a position on said surface of said substrate along said centerline.
25 Assignments
0 Petitions
Accused Products
Abstract
An accelerometer (50, 100, 120, 130) includes a substrate (58) and a proof mass (54) spaced apart from a surface (56) of the substrate (58). Compliant members (62) are coupled to the proof mass (54) and enable the proof mass (54) to move parallel to the surface (56) of the substrate (58) in a sense direction (68). Proof mass anchors (60) interconnect the compliant members (62) with the surface (56). The accelerometer (50, 100, 120, 130) includes an over-travel stop structure (52, 102, 122, 132) having stop anchors (70, 72) coupled to the substrate (58). The stop anchors (70, 72) are coupled to the substrate (58) at positions (76) on the surface (56) residing at least partially within an anchor attach area (71) bounded in the sense direction (68) by locations (78) of the proof mass anchors (60) on the surface (56).
25 Citations
13 Claims
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1. A transducer adapted to sense acceleration comprising:
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a substrate; a proof mass positioned in spaced apart relationship above a surface of said substrate; at least one compliant member coupled to said proof mass, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a sense direction; multiple proof mass anchors interconnecting said at least one compliant member with said surface, each of said multiple proof mass anchors being positioned on said surface at a perimeter of an anchor attach area in said sense direction, wherein separate locations of said proof mass anchors on said substrate define a centerline of said anchor attach area between said proof mass anchors that is perpendicular to said sense direction; and an over-travel stop structure having a stop anchor coupled to said substrate at a position on said surface of said substrate along said centerline. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A transducer adapted to sense acceleration comprising:
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a substrate; a proof mass positioned in spaced apart relationship above a surface of said substrate; at least one compliant member coupled to said proof mass, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a sense direction; multiple proof mass anchors interconnecting said at least one compliant member with said surface, each of said multiple proof mass anchors being positioned on said surface at a perimeter of an anchor attach area in said sense direction, wherein separate locations of said proof mass anchors on said substrate define a centerline of said anchor attach area between said proof mass anchors that is perpendicular to said sense direction; and an over-travel stop structure including a first stop anchor, a second stop anchor, and a stop frame encircling a periphery of said proof mass, each of said first and second stop anchors being coupled to said substrate at positions on said surface of said substrate along said centerline, and said stop frame being attached to said first and second stop anchors. - View Dependent Claims (12, 13)
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Specification