Impulse actuated MEMS devices

• US 8,186,895 B2
• Filed: 06/13/2011
• Issued: 05/29/2012
• Est. Priority Date: 09/13/2007
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US13/159,283
• Publication Number:
  US 20110274423A1
• Time in Patent Office: 351 Days
• Field of Search: 396/457, 396/461
• US Class Current: 396/461
• CPC Class Codes: G02B 5/005 Diaphragms for cameras G03B9/02
• CPC Class Codes: G03B 9/00 Exposure-making shutters; Diaphragms
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 74/18888 Reciprocating to or from oscillating

Abstract

An apparatus, useful in, for example, a miniature camera, includes an object, e.g., an optical element such as a shutter blade, an actuator operable to apply an impulse to the object such that the object moves from a first position to a second position, and at least one flexure coupled to the object and operable to confine movement of the object to movement along a predefined trajectory extending between the first and second positions.

Claims

1. An apparatus, comprising:

an object;

an actuator operable to apply a single impulse directly to the object such that the object moves from a first position to a second position; and

at least one flexure coupled to the object and operable to confine movement of the object to movement along a predefined trajectory extending between the first and second positions.

2. The apparatus of claim 1, wherein the at least one flexure is coupled to a supporting structure by a solid resilient hinge.

3. The apparatus of claim 2, wherein at least two of the object, the at least one flexure and/or the supporting structure are made integrally with each other from a substrate by micromachining.

4. The apparatus of claim 3, wherein the substrate comprises silicon.

5. The apparatus of claim 1, wherein the object comprises an optical element.

6. The apparatus of claim 5, wherein the optical element comprises a shutter blade.

7. A camera, comprising:

a housing having an aperture configured to admit light into the housing along an optical axis;

an optical element supported by at least one flexure to move between first and second positions and along a predefined trajectory intersecting the optical axis in response to a single impulse imparted directly to the optical element; and

an actuator selectably operable to impart the impulse to the optical element.

8. The camera of claim 7, wherein the predetermined trajectory is one or more of generally planar, generally arcuate, and/or generally rectilinear.

9. The camera of claim 7, wherein the first position coincides with the optical axis.

10. The camera of claim 7, wherein the second position coincides with the optical axis.

11. The camera of claim 7, wherein the optical element comprises a shutter blade.

12. The camera of claim 7, wherein the at least one flexure is operable to return the optical element from the second position to the first position.

13. A method, comprising:

providing a substrate; and

forming an object supported by at least one flexure pivotally connected to a supporting structure by at least one solid resilient hinge in the substrate,

wherein the at least one flexure is configured to confine movement of the object to a substantially planar, arcuate trajectory in response to a single impulse imparted directly to the object by an actuator.

14. The method of claim 13, wherein the substrate comprises silicon.

15. The method of claim 13, wherein the forming comprises micro-machining.

16. The method of claim 13, wherein the forming comprises photolithography.

17. The method of claim 13, wherein the object, the at least one flexure and the supporting structure are formed integrally with each other.

18. The method of claim 13, wherein the object comprises an optical element.

19. The method of claim 18, wherein the optical element comprises a shutter blade.

20. The method of claim 13, wherein the at least one flexure is further configured to return the object to an initial position after the object has been displaced therefrom.