Monitoring device of gas introducing device for analyzer
First Claim
1. A gas component monitoring device for monitoring components of the gas that has been synthesized in a gas introducing device for an analyzer, the gas introducing device comprising:
- a gas synthesis portion that synthesizes a plurality of types of gases in a mixing chamber;
a pressure regulating portion that introduces the gas synthesized in the gas synthesis portion and decompresses the gas;
a gas switching portion including a gas switching valve that performs switching so as to introduce the decompressed gas from the pressure regulating portion to the analyzer, and a gas analyzer that analyses a component of the synthesized gas, whereinthe gas synthesis portion comprises a plurality of gas introducing paths leading from a plurality of gas sources to the mixing chamber via a pressure valve, a path for exhaustion from the mixing chamber to exterior via an open/close valve, and a path for introduction from the mixing chamber to the pressure regulating portion via a flow-control valve,the pressure regulating portion comprises an introducing chamber that introduces gas from the gas synthesis portion, a path provided with a pump that decompresses the gas introduced in the introducing chamber to a pressure ranging from about 0.1 Pa to 0.1 MPa, and a path leading from the introducing chamber to the gas switching portion, andthe gas switching portion comprises a path guiding the gas from the pressure regulating portion to the analyzer via the gas switching valve, and a path for exhaustion to exterior via a pump.
1 Assignment
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Accused Products
Abstract
Gas is supplied from positive pressure (105 Pa or more) to an analyzer of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and is decompressed by a decompression pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the decompressed gas is introduced to a gas analyzer through a switching operation using a gas switching valve.
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Citations
3 Claims
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1. A gas component monitoring device for monitoring components of the gas that has been synthesized in a gas introducing device for an analyzer, the gas introducing device comprising:
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a gas synthesis portion that synthesizes a plurality of types of gases in a mixing chamber;
a pressure regulating portion that introduces the gas synthesized in the gas synthesis portion and decompresses the gas;
a gas switching portion including a gas switching valve that performs switching so as to introduce the decompressed gas from the pressure regulating portion to the analyzer, and a gas analyzer that analyses a component of the synthesized gas, whereinthe gas synthesis portion comprises a plurality of gas introducing paths leading from a plurality of gas sources to the mixing chamber via a pressure valve, a path for exhaustion from the mixing chamber to exterior via an open/close valve, and a path for introduction from the mixing chamber to the pressure regulating portion via a flow-control valve, the pressure regulating portion comprises an introducing chamber that introduces gas from the gas synthesis portion, a path provided with a pump that decompresses the gas introduced in the introducing chamber to a pressure ranging from about 0.1 Pa to 0.1 MPa, and a path leading from the introducing chamber to the gas switching portion, and the gas switching portion comprises a path guiding the gas from the pressure regulating portion to the analyzer via the gas switching valve, and a path for exhaustion to exterior via a pump. - View Dependent Claims (2, 3)
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Specification