Method for manufacturing multiple layers of waveguides
First Claim
1. A method for manufacturing multiple layers of waveguides, said method comprising:
- depositing a first cladding layer on a substrate, a first inner cladding layer on said first cladding layer, and a first waveguide material on said first inner cladding layer;
selectively etching said first inner cladding layer and said first waveguide material to form a first waveguide layer;
depositing a second inner cladding layer followed by a second cladding layer on said first waveguide layer;
removing said second inner cladding layer and planarizing said second cladding layer using a process selective to said first waveguide material to expose said first waveguide material;
depositing a third inner cladding layer followed by a second waveguide material on said first waveguide material;
selectively etching said third inner cladding layer and said second waveguide material to form a second waveguide layer; and
depositing a fourth inner cladding layer followed by a third cladding layer on said second waveguide layer.
1 Assignment
0 Petitions
Accused Products
Abstract
A method for manufacturing multiple layers of waveguides is disclosed. Initially, a first cladding layer is deposited on a substrate, a first inner cladding layer is then deposited on the first cladding layer, and a first waveguide material is deposited on the first inner cladding layer. The first inner cladding layer and the first waveguide material are then selectively etched to form a first waveguide layer. Next, a second inner cladding layer followed by a second cladding layer are deposited on the first waveguide layer. The second inner cladding layer and the second cladding layer are removed by using a chemical-mechanical polishing process selective to the first waveguide material. A third inner cladding layer followed by a second waveguide material are deposited on the first waveguide material. The third inner cladding layer and the second waveguide material are then selectively etched to form a second waveguide layer. Finally, a fourth inner cladding layer followed by a third cladding layer are deposited on the second waveguide layer.
-
Citations
6 Claims
-
1. A method for manufacturing multiple layers of waveguides, said method comprising:
-
depositing a first cladding layer on a substrate, a first inner cladding layer on said first cladding layer, and a first waveguide material on said first inner cladding layer; selectively etching said first inner cladding layer and said first waveguide material to form a first waveguide layer; depositing a second inner cladding layer followed by a second cladding layer on said first waveguide layer; removing said second inner cladding layer and planarizing said second cladding layer using a process selective to said first waveguide material to expose said first waveguide material; depositing a third inner cladding layer followed by a second waveguide material on said first waveguide material; selectively etching said third inner cladding layer and said second waveguide material to form a second waveguide layer; and depositing a fourth inner cladding layer followed by a third cladding layer on said second waveguide layer. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification