×

Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure

  • US 8,193,468 B2
  • Filed: 10/11/2005
  • Issued: 06/05/2012
  • Est. Priority Date: 03/29/2001
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method for thermal-based laser processing a multilayer, multi-material memory device including a silicon substrate and a target metal link microstructure surrounded by materials having dissimilar thermal and/or optical properties, the method comprising:

  • generating a single multi-stage temporally shaped laser pulse, said laser pulse having a selected pulse width and a temporal shape, said temporal shape comprising a fast leading edge and a fast fall time, respectively, relative to a q-switched pulse shape having the selected pulse width;

    irradiating and overfilling the target link with the single temporally shaped laser pulse; and

    removing at least a portion of the link with a thermal-based process without creating undesirable changes to other structures or the substrate with the single temporally shaped laser pulse;

    wherein each pulse stage is characterized by a controlled amplitude and temporal shape, and a duration comprising a respective portion of the overall pulse width, andwherein the single temporally shaped laser pulse comprises a higher power first portion and a lower power second portion.

View all claims
  • 14 Assignments
Timeline View
Assignment View
    ×
    ×