Thin film detector for presence detection
First Claim
1. A transducer comprising:
- a membrane configured to change shape in response to a force;
piezoelectric layer disposed over the membrane;
first and second electrodes in contact with the piezoelectric layer, wherein an electric field between the first and second electrodes is proportional to mechanical movement of the piezoelectric layer;
first and second supports located at peripheral sides of the piezoelectric layer, the first and second supports each comprising a first support layer and a second support layer, the first and second supports including piezoelectric material of the piezoelectric layer and conductive material of the first and second electrodes; and
a substrate supported by said first and second supports.
3 Assignments
0 Petitions
Accused Products
Abstract
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
41 Citations
8 Claims
-
1. A transducer comprising:
-
a membrane configured to change shape in response to a force; piezoelectric layer disposed over the membrane; first and second electrodes in contact with the piezoelectric layer, wherein an electric field between the first and second electrodes is proportional to mechanical movement of the piezoelectric layer; first and second supports located at peripheral sides of the piezoelectric layer, the first and second supports each comprising a first support layer and a second support layer, the first and second supports including piezoelectric material of the piezoelectric layer and conductive material of the first and second electrodes; and a substrate supported by said first and second supports. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
Specification