Measuring method, inspection method, inspection device, semiconductor device, method of manufacturing a semiconductor device, and method of manufacturing an element substrate
First Claim
1. A measuring method of a circuit or a circuit element, comprising:
- applying a first voltage between a pair of terminals of a first coil;
setting the first coil close to a second coil;
operating the circuit or the circuit element by applying a second voltage generated between a pair of terminals of the second coil to the circuit or the circuit element; and
reading a voltage output from the circuit or the circuit element in a non-contact manner,wherein the second coil and the circuit or the circuit element are formed over an insulating substrate.
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Accused Products
Abstract
An inspection method which simplifies an inspection step by eliminating the need to set probes on wiring or probe terminals, and an inspection device for performing the inspection step. A voltage is applied to each of inspected circuits or circuit elements to operate the same. Signal processing is performed on an output from each inspected circuit or circuit element during operation to form a signal (operation information signal) including information on the operating condition of the circuit or the circuit element. The operation information signal is amplified and the amplitude of an alternating current voltage separately input is modulated with the amplified operation information signal. The voltage of the modulated alternating current is read in a non-contact manner to determine whether the corresponding circuit or circuit element is non-defective or defective.
23 Citations
29 Claims
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1. A measuring method of a circuit or a circuit element, comprising:
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applying a first voltage between a pair of terminals of a first coil; setting the first coil close to a second coil; operating the circuit or the circuit element by applying a second voltage generated between a pair of terminals of the second coil to the circuit or the circuit element; and reading a voltage output from the circuit or the circuit element in a non-contact manner, wherein the second coil and the circuit or the circuit element are formed over an insulating substrate. - View Dependent Claims (2, 3)
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4. A measuring method of a circuit or a circuit element, comprising:
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applying a first voltage between a pair of terminals of a first coil; setting the first coil close to a second coil; operating the circuit or the circuit element by applying a second voltage generated between a pair of terminals of the second coil to the circuit or the circuit element; forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element; and reading a voltage of the modulated signal in a non-contact manner, wherein the second coil and the circuit or the circuit element are formed over an insulating substrate. - View Dependent Claims (5, 6)
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7. An inspecting method of a circuit or a circuit element, comprising:
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applying a first ac voltage between a pair of terminals of a first coil; overlapping the first coil and a second coil with a certain spacing set therebetween; forming a signal for operating the circuit or the circuit element from a second ac voltage generated between a pair of terminals of the second coil; operating the circuit or the circuit element by inputting the signal to the circuit or the circuit element; forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element; applying the modulated signal between a pair of terminals of a third coil; overlapping the third coil and a fourth coil with a certain spacing set therebetween; and inspecting the operating condition of the circuit or the circuit element through a fourth voltage generated between a pair of terminals of the fourth coil. - View Dependent Claims (8)
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9. An inspecting method of inspecting a circuit or a circuit element, comprising:
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applying a first ac voltage between a pair of terminals of a first coil; overlapping the first coil and a second coil with a certain spacing set therebetween; operating the circuit or the circuit element by rectifying a second ac voltage generated between a pair of terminals of the second coil or shaping a waveform of the second ac voltage and by applying the rectified or waveform-shaped voltage to the circuit or the circuit element; forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element; applying the modulated signal between a pair of terminals of a third coil; overlapping the third coil and a fourth coil with a certain spacing set therebetween; and inspecting the operating condition of the circuit or the circuit element through a fourth voltage generated between a pair of terminals of the fourth coil. - View Dependent Claims (10)
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11. An inspecting method of a circuit or a circuit element, comprising:
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applying first ac voltages differing in phase between pairs of terminals of a plurality of first coils; overlapping the plurality of first coils and a plurality of second coils with a certain spacing set therebetween; generating ac voltages differing in phase between pairs of terminals of the plurality of second coils; generating dc voltages by rectifying the ac voltages generated between the pairs of terminals of the plurality of second coils and differing in phase and by adding together the rectified ac voltages; applying a second ac voltage between a pair of terminals of a third coil; overlapping the third coil and a fourth coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the fourth coil; modulating the ac voltage generated between the pair of terminals of the fourth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the dc voltage to the circuit or the circuit element; applying the modulated ac voltage between a pair of terminals of a fifth coil; overlapping the fifth coil and a sixth coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the sixth coil; and inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the sixth coil. - View Dependent Claims (12, 13, 14, 15)
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16. An inspecting method of a circuit or a circuit element, comprising:
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applying first ac voltages differing in phase between pairs of terminals of a plurality of first coils; overlapping the plurality of first coils and a plurality of second coils with a certain spacing set therebetween; generating ac voltages differing in phase between pairs of terminals of the plurality of second coils; generating a dc voltage by rectifying the ac voltages generated between the pairs of terminals of the plurality of second coils and differing in phase and by adding together the rectified ac voltages; applying a second ac voltage between a pair of terminals of a third coil; overlapping the third coil and a fourth coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the fourth coil; generating a voltage for driving the circuit or the circuit element by shaping a waveform of the ac voltage generated between the pair of terminals of the fourth coil; applying a third ac voltage between a pair of terminals of a fifth coil; overlapping the fifth coil and a sixth coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the sixth coil; modulating the ac voltage generated between the pair of terminals of the sixth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the dc voltage and the voltage for driving the circuit and the circuit element to the circuit or the circuit element; applying the modulated ac voltage between a pair of terminals of a seventh coil; overlapping the seventh coil and a eighth coil with a certain spacing set therebetween; generating an ac voltage between a pair of the eighth coil; and inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the eighth coil. - View Dependent Claims (17, 18, 19, 20)
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21. An inspecting method of a circuit or a circuit element, comprising:
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applying a first ac voltage between a pair of terminals of a first coil; overlapping the first coil and a second coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the second coil; generating a voltage for driving the circuit or the circuit element by shaping a waveform of the ac voltage generated between the pair of terminals of the second coil; applying a second ac voltage between a pair of terminals of a third coil; overlapping the third coil and a fourth coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the fourth coil; modulating the ac voltage generated between the pair of terminals of the fourth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the voltage for driving the circuit and the circuit element to the circuit or the circuit element; applying the modulated ac voltage between a pair of terminals of a fifth coil; overlapping the fifth coil and a sixth coil with a certain spacing set therebetween; generating an ac voltage between a pair of terminals of the sixth coil; and inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the sixth coil. - View Dependent Claims (22, 23, 24, 25)
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26. A method comprising:
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applying a first ac voltage between a pair of terminals of a first coil; overlapping the first coil and a second coil with a certain spacing set therebetween; generating a first signal for driving a circuit or a circuit element by shaping a waveform of a second ac voltage generated between the pair of terminals of the second coil; and supplying the first signal to the circuit or the circuit element, wherein the circuit or the circuit element is at least one selected from the group consisting of a signal line drive circuit, a scanning line drive circuit, and a pixel portion. - View Dependent Claims (27)
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28. A method comprising:
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applying a power supply voltage and a drive signal to a circuit or a circuit element of an active matrix display device in a non-contact manner, wherein the circuit or the circuit element is at least one selected from the group consisting of a signal line drive circuit, a scanning line drive circuit, and a pixel portion. - View Dependent Claims (29)
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Specification