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Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method

  • US 8,194,232 B2
  • Filed: 07/18/2008
  • Issued: 06/05/2012
  • Est. Priority Date: 07/24/2007
  • Status: Active Grant
First Claim
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1. A movable body drive system in which a movable body is driven at least in a uniaxial direction, the system comprising:

  • a laser interferometer which measures positional information of the movable body in the uniaxial direction at a first sampling interval;

    an encoder which measures positional information of the movable body in the uniaxial direction at a second sampling interval;

    a drive device which drives the movable body; and

    a controller which drives the movable body in the uniaxial direction via the drive device based on measurement results of the encoder, and when detecting abnormality occurring in the encoder output, switches a measurement device used in position control of the movable body in the uniaxial direction from the encoder to the laser interferometer whose output coordinate has been corrected to be successive to an output of the encoder just before.

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