Method for operating a dual beam chromatic point sensor system for simultaneously measuring two surface regions
First Claim
1. A method for operating a multi-beam chromatic confocal point sensor system for simultaneously measuring two surface regions, the method comprising:
- providing a multi-beam chromatic confocal point sensor system configured to simultaneously measure two surface regions, the system comprising an optical pen having a confocal aperture and providing two measurement beams simultaneously along different measuring paths;
positioning a first measurement beam from the system on a first surface region and a second measurement beam from the system on a second surface region, wherein at least the first surface region is located on a workpiece;
receiving workpiece measurement light arising from the first and second measurement beams back through the system and the confocal aperture;
determining at least one set of measurements comprising first and second distance measurements arising from the first and second measurement beams, respectively; and
determining at least one of a workpiece feature measurement and a change in position of a workpiece feature, based on the at least one set of measurements.
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Accused Products
Abstract
A system and method provide a dual beam chromatic point sensor (CPS) system operable to simultaneously measure two surface regions. In one embodiment, a single beam CPS optical pen may have a dual beam assembly attached. First and second measurement beams of the system may be positioned on respective first and second surface regions, and both reflect light through a confocal aperture of the dual beam CPS. At least one set of measurements is determined, comprising a first and second measurement arising from the first and second measurement beams, respectively. At least the first surface region may be moved to acquire sets of measurements at various positions. Each measurement may be determined with extremely fine resolution (e.g., at least as fine as 10 nm). The system and method satisfy applications that require such resolution and accuracy without the use of an interferometer or other costly and complex elements.
47 Citations
19 Claims
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1. A method for operating a multi-beam chromatic confocal point sensor system for simultaneously measuring two surface regions, the method comprising:
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providing a multi-beam chromatic confocal point sensor system configured to simultaneously measure two surface regions, the system comprising an optical pen having a confocal aperture and providing two measurement beams simultaneously along different measuring paths; positioning a first measurement beam from the system on a first surface region and a second measurement beam from the system on a second surface region, wherein at least the first surface region is located on a workpiece; receiving workpiece measurement light arising from the first and second measurement beams back through the system and the confocal aperture; determining at least one set of measurements comprising first and second distance measurements arising from the first and second measurement beams, respectively; and determining at least one of a workpiece feature measurement and a change in position of a workpiece feature, based on the at least one set of measurements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification