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Monolithically integrated laser diode chip having a construction as a multiple beam laser diode

  • US 8,194,712 B2
  • Filed: 06/30/2008
  • Issued: 06/05/2012
  • Est. Priority Date: 06/29/2007
  • Status: Active Grant
First Claim
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1. A monolithically integrated laser diode chip having a construction as a multiple beam laser diode, comprising:

  • a semiconductor substrate comprised of GaAs;

    at least two laser stacks, which are arranged one above another on the semiconductor substrate and which each contain an active zone arranged between waveguide layers and the waveguide layers each adjoin a cladding layer at a side remote from the active zone,wherein at least one of the waveguide layers or cladding layers of at least one laser stack, comprises AlxGa1-xAs, where 0≦

    x≦

    1, and at least one additional element from main group III or V, such that the lattice mismatch between the at least one waveguide layer or cladding layer comprising the at least one additional element and the semiconductor substrate composed of GaAs is reduced;

    wherein the lattice constant of the at least one waveguide layer or cladding layer is reduced by the at least one additional element; and

    wherein the at least one waveguide layer or cladding layer is directly adjacent to the semiconductor substrate.

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