Nanoindenter

• US 8,196,458 B2
• Filed: 03/23/2010
• Issued: 06/12/2012
• Est. Priority Date: 03/13/2006
• Status: Active Grant

• Current Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Original Assignee: Asylum Research Corporation (Oxford Instruments PLC)
• Inventors: Bonilla, Flavio Alejandro, Proksch, Roger, Cleveland, Jason, Sauter, Tim
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US12/729,339
• Publication Number:
  US 20100180356A1
• Time in Patent Office: 812 Days
• Field of Search: 73/78, 73/81, 73/82, 731/05, 850/1, 850/5, 850/6, 850/21, 850/22, 850/33, 850/40, 850/52, 850/56, 850/62, 850/63, 977/860, 977/863, 977/868, 977/875
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01N 2203/0078 using indentation
• CPC Class Codes: G01N 3/317 generated by electromagnetic means
• CPC Class Codes: G01Q 60/366 Nanoindenters, i.e. wherein the indenting force is measured

Abstract

A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

Claims

1. An assembly, comprising:

a cantilever based instrument which includes an area that is adapted for connection to a cantilever, an actuator, and sensors for measuring displacement and force; and

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to a sample being measured, wherein said indenter probe is located in said area of said connection to said cantilever and that replaces said cantilever in said instrument, and uses the same actuator and sensors as said cantilever based instrument, wherein said indenter portion forms a module which is installed in the cantilever based instrument in place of a cantilever holder, wherein said indenter portion includes a monolithic three-dimensional flexure through which the indenter probe is moved by said actuator in a Z axis direction, which is a direction perpendicular to a plane of the flexure and perpendicular to the sample.

2. An assembly as in claim 1, wherein said cantilever based instrument is an atomic force microscope.

3. An assembly as in claim 1, wherein said cantilever based instrument is a device from the group consisting of an atomic force microscope, a molecular force probe, a high resolution profilometer, a chemical sensing probe, or a biological sensing probe.

4. An assembly as in claim 1, further comprising a cover which constrains movement of said flexure beyond a specified amount.

5. An assembly as in claim 4, further comprising hard stops that prevent extending the flexure in said Z axis direction by more than a specified amount.

6. An assembly as in claim 1, wherein said flexure has first, second and third portions which constrain the flexure against movement in directions other than said Z axis direction and a flexing portion at a center portion thereof.

7. An assembly as in claim 6, wherein said flexure is a three-dimensional leaf spring.

8. An assembly as in claim 7, wherein said three portions of said three-dimensional leaf spring have supporting portions at outer edges thereof.

9. An assembly as in claim 1, further comprising a structure that converts linear motion of the indenter probe into angular motion of a type that is monitored by said sensors.

10. An assembly as in claim 9, further comprising a second, high compliance flexure formed of a planar leaf spring with two ends and a center, with one end disposed to be displaced in tandem with the monolithic flexure, and another end disposed to be displaced in tandem with the indenter probe, so that the relative linear motion of the probe is detected as angular motion by the sensors.

11. An assembly, comprising:

a cantilever based instrument which includes a connection to a cantilever, an actuator for said cantilever portion, and sensors for measuring displacement and force; and

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to a sample being measured, wherein said indenter probe connects in a location which connects to said connection to said cantilever in place of a cantilever in said instrument, and uses the same actuator and sensors as said cantilever based instrument, wherein said indenter portion forms a module which is installed in the cantilever based instrument in place of a cantilever holder, wherein said indenter portion includes an assembled three-dimensional flexure having a circular outer shape through which the indenter probe is moved by said actuator in a Z axis direction.

12. An assembly as in claim 11, wherein said flexure includes a spring, which is formed of a first spring portion and a second spring portion, said spring portions being interleaved with a clamp constraining the spring portions at their respective peripheries, said clamp being formed of a first clamp portion, a second clamp portion and a third clamp portion, and a flexing portion at a center portion thereof.

13. An assembly as in claim 12, wherein said spring is a planar leaf spring.

14. An assembly as in claim 11, wherein said indenter probe is moved by said actuator to apply force.

15. A device as in claim 14, wherein said probe is made of one of diamond or sapphire.

16. An assembly, comprising:

a cantilever based instrument which includes a connection to a cantilever, an actuator for said connection, and sensors for measuring displacement and force of said connection;

an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to a sample being measured, wherein said indenter probe connects in a location which connects to said connection to said cantilever in place of a cantilever in said instrument, and uses the same actuator and sensors as said cantilever based instrument; and

an angular change element, that detects linear changes in the indenter probe and converts such changes into angular changes which can be detected by the sensors.

17. An assembly as in claim 16, wherein said cantilever based instrument also uses optics for obtaining information from movement of the cantilever, and wherein said indenter portion uses the same said optics as said cantilever based instrument.

18. A method, comprising:

in a first mode at a first time, using a cantilever based instrument which includes a connection to a cantilever, an actuator for said cantilever portion, and sensors which operate for measuring displacement and force of said connection to said cantilever; and

in a second mode at a second time different than the first time, using the instrument which is configured with an indenter portion including an indenter probe, which is movable to move perpendicularly relative to a sample being measured, wherein said indenter probe uses the same actuator and sensors as said cantilever based instrument, wherein said second mode constrains motion of the indenter probe to a motion perpendicular to a plane of the sample being measured using a flexure and,

further comprising constraining movement of said flexure beyond a specified amount.

19. A method as in claim 18, wherein said first mode uses an atomic force microscope as said cantilever based instrument.

20. A method as in claim 18, wherein said second mode constrains motion of the indenter probe to a motion perpendicular to a plane of the sample being measured using a flexure.

21. A method as in claim 18, wherein said indenter probe is moved by said actuator to apply force.

22. An assembly as in claim 18, wherein said cantilever based instrument also uses optics for obtaining information from movement of the cantilever, and wherein said indenter portion uses the same optics as said cantilever based instrument.