Instrumented platform for vibration sensitive equipment

• US 8,196,891 B2
• Filed: 11/21/2007
• Issued: 06/12/2012
• Est. Priority Date: 10/24/2003
• Status: Active Grant

• Current Assignee: Newport Corporation (MKS Instruments Incorporated)
• Original Assignee: Newport Corporation (MKS Instruments Incorporated)
• Inventors: Ryaboy, Vyacheslav M., Booth, Warren
• Primary Examiner(s): McKinnon, Terrell
• Assistant Examiner(s): MARSH, STEVEN M
• Application Number:
  US11/986,538
• Publication Number:
  US 20080121779A1
• Time in Patent Office: 1,665 Days
• Field of Search: 248/638, 248/678, 248/559, 248/550, 736/63, 736/64, 736/66, 736/68
• US Class Current: 248/638
• CPC Class Codes: A47B 13/08 Table tops; Rims therefor not restricted to table tops A47B95/04
• CPC Class Codes: A47B 2037/005 Tables specially adapted for laboratories
• CPC Class Codes: A47B 37/00 Tables adapted for other particular purposes glass cutting tables C03B33/03
• CPC Class Codes: F16F 15/002 characterised by the control method or circuitry control of mechanical oscillations per se G05D19/00
• CPC Class Codes: F16F 15/005 using electro- or magnetostrictive actuation means generating of mechanical vibrations operating with electrostriction B06B1/06, with magnetostriction B06B1/08; vehicle suspension arrangements characterised by use of piezoelectric elements B60G17/01941; piezoelectric, electrostrictive and magnetostrictive devices per se H10N30/00
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: F16F 7/1011 by electromagnetic means
• CPC Class Codes: F16M 11/18 with mechanism for moving the apparatus relatively to the stand
• CPC Class Codes: G01H 13/00 Measuring resonant frequency

Abstract

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

Claims

1. A platform assembly that supports a vibration-sensitive payload, comprising:

a tabletop having a first surface coupled to the vibration-sensitive payload, a second surface, and an inner core located between said first and second surfaces;

a damper located within the inner core, the damper including an active actuator therein;

a vibration sensor located within the inner core; and

a control circuit coupled to the vibration sensor and the active actuator, the control circuit configured to cause the active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface.

2. The assembly of claim 1, wherein the vibration sensor is attached to the first surface.

3. The assembly of claim 1, further comprising an electrical connector attached to an external surface of the platform and coupled to the vibration sensor.

4. The assembly of claim 1, further comprising a monitor coupled to the vibration sensor.

5. The assembly of claim 1, further comprising a honeycomb core within the inner core.

6. The assembly of claim 1, wherein the vibration sensor includes a wireless transmitter.

7. A platform assembly that supports a vibration-sensitive payload, comprising:

a tabletop having a first surface coupled to the vibration-sensitive payload, a second surface and an inner core located between the first and second surfaces;

a damper located within the inner core;

a vibration sensor means for sensing a vibration of the first surface;

an active actuator located within the damper and coupled the vibration sensor means; and

a control circuit coupled to the vibration sensor and the active actuator, the control circuit configured to cause the active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface.

8. The assembly of claim 7, wherein the first surface and the vibration sensor means includes a vibration sensor attached to the first surface.

9. The assembly of claim 7, further comprising an electrical connector attached to an external surface of the platform and coupled to the vibration sensor means.

10. The assembly of claim 7, further comprising a monitor coupled to the vibration sensor means.

11. The assembly of claim 7, further comprising a honeycomb core within the inner core.

12. The assembly of claim 7, wherein the vibration sensor means includes a wireless transmitter.

13. A platform assembly that supports a vibration-sensitive payload comprising:

a tabletop having a first surface configured to support a vibration-sensitive payload, a second surface, and an inner core located between and coupled to the first and second surfaces;

one or more vibration sensors located within the inner core configured to sense a vibration of a surface of the tabletop;

a damper located within the inner core configured to apply a force to a surface of the tabletop;

an active actuator located within the damper and coupled the vibration sensor

a control circuit coupled to the vibration sensor and the active actuator; and

a monitor in communication with the one or more sensors and the dampener, the monitor configured to receive vibration information from the one or more sensors and provide an excitation signal to the damper, wherein the damper is configured to apply an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface in response to the excitation signal from the control circuit in communication with the monitor.

14. The device of claim 13 further comprising a honeycomb core within said inner core.