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Hermetically sealed semiconductor device module

  • US 8,198,712 B2
  • Filed: 06/07/2007
  • Issued: 06/12/2012
  • Est. Priority Date: 06/07/2006
  • Status: Active Grant
First Claim
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1. A sealed semiconductor power module comprising:

  • a metallic base plate having a metallic plating;

    a substrate comprised of aluminum and nitrogen, and having two major surfaces, a bottom surface of the two major surfaces positioned on the base plate and a top surface of the two major surfaces including a first pad and a second pad, the substrate including a directly bonded copper bonding bonded to both of the two major surfaces;

    a first die positioned on top of the first pad and a second die positioned on top of the second pad, the first die and the second die each including a main contact area formed integral to each die on a top surface of each die, the first die including a gate area on the top surface of the first die, the gate area being isolated from direct electrical contact with the main contact area of the first die;

    a first power terminal in wirebondless electrical connection to the main contact area of the first die via a first molybdenum tab disposed between the main contact area of the first die and the first power terminal, anda second power terminal in wirebondless electrical connection to the main contact area of the second die via a second molybdenum tab disposed between the main contact area of the second die and the second power terminal;

    a third power terminal in wirebondless electrical connection to the substrate via a third molybdenum tab disposed between the third power terminal and the substrate;

    a gate terminal in electrical contact with the gate area; and

    a cover that includes a frame physically attached to and surrounding the base plate and a lid physically attached to the frame and including apertures above the first die and the second die, the cover configured to seal the first die and the second die,wherein the first power terminal, the second power terminal, the third power terminal, and the gate terminal extend from an interior space of the cover to the exterior of the cover whereby a contact portion of the first power terminal, a contact portion of the second power terminal, a contact portion of the third power terminal, and a contact portion of the gate terminal traverse the apertures of the lid and are exposed over a top surface of a top of the lid; and

    wherein the cover comprises a first metal insert, and the first power terminal is folded over the first metal insert.

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