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Vibration elements

  • US 8,199,389 B2
  • Filed: 03/10/2009
  • Issued: 06/12/2012
  • Est. Priority Date: 03/10/2008
  • Status: Active Grant
First Claim
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1. A vibration unit, comprising:

  • a frame;

    a vibration element configured to vibrate and with a substrate having a first etched surface formed on a top surface of the substrate and a second etched surface formed on a bottom surface of the substrate, the first etched surface and the second etched surface communicate with each other at a meeting point located at a position other than a center position in a thickness direction of the substrate of the vibration element; and

    a beam connecting the vibration element to the frame.

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