Image processing apparatus for analysis of pattern matching failure

• US 8,200,006 B2
• Filed: 05/04/2009
• Issued: 06/12/2012
• Est. Priority Date: 08/08/2005
• Status: Expired due to Fees

• Current Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Ikeda, Mitsuji, Maeda, Tatsuya, Nasu, Osamu, Sasajima, Fumihiro
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US12/434,786
• Publication Number:
  US 20090214122A1
• Time in Patent Office: 1,135 Days
• Field of Search: 382/209, 382/165, 382/145, 382/132, 382/118
• US Class Current: 382/165
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.

Claims

1. An image processing device comprising:

a memory for storing a template for pattern matching and an image of a subject;

a display unit for displaying the template and the image of the subject;

a region specifying means for specifying a region in the image of the subject that is to be used for calculation of difference information with respect to a template image; and

difference information computing means for computing the difference information between the region in the image of the subject specified by the region specifying means and the template image based on either the equation

2. The image processing device according to claim 1, wherein the region specifying means includes an input unit for designating a desired region on the image of the subject displayed on the display unit.

3. The image processing device according to claim 2, wherein the region specifying means includes a template matching device, wherein the region in the image of the subject specified by the input unit is subjected to template matching using the template image so as to specify a region.

4. The image processing device according to claim 3, wherein the display unit also displays difference information between a region detected as being most similar to the template image by the template matching performed on the subject image and the template image.

5. The image processing device according to claim 1, wherein the region specifying means includes a template matching device for carrying out template matching and outputting a plurality of matching candidates with respect to the image of the subject using the template image, and an input unit for designating a desired matching candidate from among the plurality of matching candidates outputted by the template matching device.

6. The image processing device according to claim 1, wherein the region specifying means displays the template image on the display unit in a semitransparent manner, and an input unit for moving the template image displayed in a semitransparent manner on the subject image.

7. An image processing device comprising:

a memory for storing a template for pattern matching and an image of a subject;

a display unit for displaying the template and the image of the subject;

a region specifying device for specifying an objective area in a searched area of the image that is carried out by the pattern matching; and

difference information computing means for computing difference information between the objective area in the image of the subject specified by the region specifying device and a template image based on either the equation

8. The image processing device according to claim 7, wherein the region specifying device includes an input unit for designating a desired region on the image of the subject displayed on the display unit.

9. The image processing device according to claim 8, wherein the region specifying device includes a template matching device, and wherein the region in the image of the subject specified by the input unit is subjected to template matching using the template image so as to specify a region.

10. The image processing device according to claim 9, wherein the display unit also displays difference information between a region detected as being most similar to the template image by the template matching performed on the subject image and the template image.

11. The image processing device according to claim 7, wherein the region specifying device includes a template matching device for carrying out template matching and outputting a plurality of matching candidates with respect to the image of the subject using the template image, and an input unit for designating a desired matching candidate from among the plurality of matching candidates outputted by the template matching device.

12. The image processing device according to claim 7, wherein the region specifying device displays the template image on the display unit in a semitransparent manner, and further comprising an input unit for moving the template image displayed in a semitransparent manner on the subject image.