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Sensor

  • US 8,201,449 B2
  • Filed: 11/09/2007
  • Issued: 06/19/2012
  • Est. Priority Date: 11/14/2006
  • Status: Active Grant
First Claim
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1. A sensor comprising:

  • a detecting element including an acceleration sensor which comprises;

    a weight coupled to a rigid section via a flexible section, the flexible section comprising;

    a first arm coupled to the rigid section at a first end of the first arm, anda second arm coupled orthogonally to the first arm at a second end of the first arm, the second arm being further coupled to the weight and supports the weight as a cantilever;

    a substrate confronting the weight; and

    an electrode section formed of opposed electrodes placed on respective opposed faces of the weight and the substrate,wherein the substrate is formed of a first substrate and a second substrate confronting each other for sandwiching the weight along a gravitational direction, and the opposed electrodes are placed on the respective opposed faces of the weight, the first substrate and the second substrate respectively, and the acceleration sensor detects a change in an electrostatic capacity between the opposed electrodes for detecting acceleration.

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