Sensor
First Claim
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1. A sensor comprising:
- a detecting element including an acceleration sensor which comprises;
a weight coupled to a rigid section via a flexible section, the flexible section comprising;
a first arm coupled to the rigid section at a first end of the first arm, anda second arm coupled orthogonally to the first arm at a second end of the first arm, the second arm being further coupled to the weight and supports the weight as a cantilever;
a substrate confronting the weight; and
an electrode section formed of opposed electrodes placed on respective opposed faces of the weight and the substrate,wherein the substrate is formed of a first substrate and a second substrate confronting each other for sandwiching the weight along a gravitational direction, and the opposed electrodes are placed on the respective opposed faces of the weight, the first substrate and the second substrate respectively, and the acceleration sensor detects a change in an electrostatic capacity between the opposed electrodes for detecting acceleration.
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Abstract
A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.
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Citations
15 Claims
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1. A sensor comprising:
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a detecting element including an acceleration sensor which comprises; a weight coupled to a rigid section via a flexible section, the flexible section comprising; a first arm coupled to the rigid section at a first end of the first arm, and a second arm coupled orthogonally to the first arm at a second end of the first arm, the second arm being further coupled to the weight and supports the weight as a cantilever; a substrate confronting the weight; and an electrode section formed of opposed electrodes placed on respective opposed faces of the weight and the substrate, wherein the substrate is formed of a first substrate and a second substrate confronting each other for sandwiching the weight along a gravitational direction, and the opposed electrodes are placed on the respective opposed faces of the weight, the first substrate and the second substrate respectively, and the acceleration sensor detects a change in an electrostatic capacity between the opposed electrodes for detecting acceleration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A sensor comprising:
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a detecting element including an acceleration sensor and an angular velocity element, the acceleration sensor comprises; a weight coupled to a rigid section via a flexible section, a substrate confronting the weight, and an electrode section formed of opposed electrodes placed on respective opposed faces of the weight and the substrate; and the angular velocity element comprises another electrode section placed on the flexible section, wherein the electrode section placed on the weight and the another electrode section placed on the flexible section include respectively an upper electrode and a lower electrode with a piezoelectric layer existing between the upper and the lower electrodes, wherein the acceleration sensor shorts the upper electrode to the lower electrode of the electrode section placed on the weight, and detects an electrostatic capacity between the opposed electrodes placed on the respective opposed faces of the weight and the substrate for detecting acceleration, and wherein the angular velocity sensor detects a status change, caused by Coriolis force, of the flexible section, bent by Coriolis force, in the another electrode section for detecting angular velocity. - View Dependent Claims (12, 13, 14, 15)
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Specification