Planar inductive structure

• US 8,203,416 B2
• Filed: 05/21/2008
• Issued: 06/19/2012
• Est. Priority Date: 05/23/2007
• Status: Active Grant

• Current Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Inventors: Ezzeddine, Hilal
• Primary Examiner(s): Mai, Anh
• Assistant Examiner(s): Hinson, Ronald
• Application Number:
  US12/124,940
• Publication Number:
  US 20090066461A1
• Time in Patent Office: 1,490 Days
• Field of Search: 336/192, 336/200, 336/223, 336/232, 333/25
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0013 with stacked layers
• CPC Class Codes: H01F 2017/0046 with a conductive path having a bridge
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/3011 Impedance
• CPC Class Codes: H01P 5/10 for coupling balanced lines or devices with unbalanced lines or devices

Abstract

A spiral structure having at least one planar winding in at least one first conductive level to form at least one inductive element, wherein the winding is surrounded with a conductive plane and at least one track is formed in a second conductive level and has two ends connected by conductive vias to the plane of the first level, at diametrically opposite positions with respect to the center of the winding.

Claims

1. A spiral structure comprising at least one planar winding in a first conductive level to form at least one inductive element, wherein:

said at least one planar winding is completely surrounded in the first conductive level by a continuous monolithic conductive material within the first conductive level; and

at least one conductive track formed in a second conductive level, the at least one conductive track being free of connection from the at least one planar winding in the first conductive level and the at least one conductive track having two ends that are connected by conductive vias to the continuous monolithic conductive material of the first conductive level, wherein the two ends are at diametrically opposite positions with respect to a center region of the at least one planar winding.

2. The structure of claim 1, wherein said conductive track is continuous from one end to the other.

3. The structure of claim 1, wherein said conductive track is interrupted at the center region of the at least one planar winding.

4. The structure of claim 1, wherein a width of the conductive track is, at the center region of the at least one planar winding, smaller than or equal to one third of an internal diameter of the at least one planar winding.

5. The structure of claim 1, wherein said conductive material is connected to a reference voltage.

6. The structure of claim 1, wherein a plurality of conductive tracks are distributed in the second conductive level by having their respective ends connected to the conductive material of the first conductive level.

7. The structure of claim 1, wherein at least one second winding is formed in a third conductive level superposed to the first and second conductive levels.

8. The structure of claim 1, wherein two interdigited planar windings are formed in the first conductive level.

9. The structure of claim 1, wherein a width of the conductive track is greater at a center portion of the spiral structure than at ends of the conductive track, wherein the ends of the conductive track are intended to be connected to the conductive material of the first conductive level.

12. The structure of claim 1, wherein the at least one conductive track is conductively connected only to the conductive material of the first conductive level.

13. The structure of claim 1, further comprising at least one second conductive track formed in the second conductive level, the at least one second conductive track connected to the at least one planar winding in the first conductive level.

14. The structure of claim 13, wherein the at least one second conductive track formed in the second conductive level is free of connection from the continuous monolithic conductive material of the first conductive level.

10. A combiner/divider in distributed lines including a spiral structure comprising at least one planar winding in a first conductive level to form at least one inductive element, wherein:

said at least one planar winding is surrounded by a conductive plane in the first conductive level;

at least one conductive track formed in a second conductive level, the at least one conductive track being free of connection from the at least one planar winding and the at least one conductive track having two ends that are connected by conductive vias to the first conductive level, wherein the two ends are at diametrically opposite positions with respect to a center region of the at least one planar winding, and further comprising;

a first line formed of a first planar winding in the first conductive level, and the first line formed of a second planar winding in a third conductive level; and

a second line formed of a third planar winding interdigited with the first planar winding in the first conductive level, and the second line formed of a fourth planar winding interdigited with the second winding in the third conductive level,

wherein the at least one conductive track formed in the second conductive level is superposed to the first and third conductive levels.

11. The combiner/divider of claim 10, wherein the planar windings each have a width that is greater at an inside region than an outside region.