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Substrate device or package using embedded layer of voltage switchable dielectric material in a vertical switching configuration

  • US 8,203,421 B2
  • Filed: 04/02/2009
  • Issued: 06/19/2012
  • Est. Priority Date: 04/14/2008
  • Status: Active Grant
First Claim
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1. A method for forming a substrate device, the method comprising:

  • forming a substrate stack comprising (i) an electrically isolative layer, (ii) voltage switchable dielectric (VSD) material that underlies the electrically isolative material, and (iii) a grounding electrode, the VSD material overlaying the grounding electrode;

    forming an opening into the electrically isolative layer without extending the opening through the layer of VSD material; and

    forming conductive material on at least a portion of the opening in order to form a first electrode that is in contact with VSD material.

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