Stitching of near-nulled subaperture measurements

• US 8,203,719 B2
• Filed: 04/08/2009
• Issued: 06/19/2012
• Est. Priority Date: 04/08/2008
• Status: Active Grant

• Current Assignee: QED Technologies International LLC
• Original Assignee: QED Technologies International, Inc. (Entegris Incorporated)
• Inventors: Murphy, Paul, Devries, Gary, Brophy, Christopher, Forbes, Greg
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): Cook, Jonathon
• Application Number:
  US12/384,723
• Publication Number:
  US 20090251702A1
• Time in Patent Office: 1,168 Days
• Field of Search: 356/450, 356/512
• US Class Current: 356/512
• CPC Class Codes: G01B 9/02039 by matching the wavefront with a particular object surface shape
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02058 by particular optical compensation or alignment elements, e.g. dispersion compensation
• CPC Class Codes: G01M 11/0207 Details of measuring devices
• CPC Class Codes: G01M 11/0257 by analyzing the image formed by the object to be tested

Abstract

A metrology system for measuring aspheric test objects by subaperture stitching. A wavefront-measuring gauge having a limited capture range of wavefront shapes collects partially overlapping subaperture measurements over the test object. A variable optical aberrator reshapes the measurement wavefront with between a limited number of the measurements to maintain the measurement wavefront within the capture range of the wavefront-measuring gauge. Various error compensators are incorporated into a stitching operation to manage residual errors associated with the use of the variable optical aberrator.

Claims

1. A method of expanding the operating range of a metrology system for measuring aspheric test objects comprising steps of:

associating an optical wavefront propagator with a physical test object in a plurality of different relationships for conveying optical measurement wavefronts to the test object;

acquiring partially overlapping optical wavefront measurements of the test object in each of the different relationships by measuring shapes of the measurement wavefronts with an optical wavefront-measuring gauge having a limited capture range of wavefront shapes;

reshaping the measurement wavefront into an aspheric form with a variable optical aberrator between a limited number of the measurements in the different relationships to maintain the measurement wavefront within the capture range of the wavefront-measuring gauge;

incorporating compensators in an operation for assembling the partially overlapping measurements into a composite measurement, and

acquiring values for the compensators in the operation for reducing differences between overlapping portions of the measurements that are at least partially attributable to the reshaping of the measurement wavefront by the variable optical aberrator.

2. The method of claim 1 wherein

(a) the variable optical aberrator is adjustable through a range of settings for reshaping the measurement wavefront,

(b) the compensators have both an amplitude and a functional form that defines a change in the shape of the measurement wavefront that is scalable by the amplitude, and

(c) the compensators include partially interlocked compensators, and

(d) the step of acquiring values for the compensators includes acquiring values for the partially interlocked compensators having a substantially common amplitude over a set of measurements taken at the same setting of the variable optical aberrator.

3. The method of claim 2 wherein the step of acquiring values for the compensators includes acquiring values for the partially interlocked compensators having a different substantially common amplitude over a different set of the measurements taken at a different setting of the variable optical aberrator.

4. The method of claim 3 including a step of using the partially interlocked compensators to define differences between an estimated change in the shape of the measurement wavefront produced at a particular setting of the variable optical aberrator and an actual change in the shape of the measurement wavefront produced at the particular setting of the variable optical aberrator.

5. The method of claim 4 including a step of basing the estimated change in the shape of the measurement wavefront produced at each setting of the variable optical aberrator on a model of the variable optical aberrator.

6. The method of claim 5 including a step of relating a variable within the model of the variable optical aberrator to a change in the shape of the measurement wavefront that is scalable by the amplitude.

7. The method of claim 6 including steps of reconfiguring the variable optical aberrator between settings and acquiring values for the at least one partially interlocked compensator based on the reconfiguration of the variable optical aberrator.

8. The method of claim 1 wherein

the wavefront-measuring gauge includes an interferometer,

the measurement wavefront includes a test wavefront and a reference wavefront,

the step of acquiring partially overlapping wavefront measurements of the test object includes propagating the test wavefront into an encounter with the test object and comparing a change in shape of the test wavefront as effected by the encounter with the test object against the reference wavefront, and

the step of reshaping the measurement wavefront into the aspheric form with the variable optical aberrator includes changing the shape of at least one of the test wavefront and the reference wavefront to reduce differences between the test and reference wavefronts.

9. The method of claim 1 wherein the wavefront-measuring gauge includes

a wavefront sensor for measuring a limited range of wavefront shapes within the capture range of the wavefront-measuring gauge, and

a wavefront generator that generates the measurement wavefront in a shape that is within the limited range of wavefront shapes measurable by the wavefront sensor.

10. The method of claim 9 wherein

the step of acquiring partially overlapping wavefront measurements of the test object includes propagating the measurement wavefront into an encounter with the test object for changing the shape of the measurement wavefront in accordance with a physical characteristic of the test object and

the step of reshaping the measurement wavefront with the variable optical aberrator includes changing the shape of the measurement wavefront so that a combined effect of the changes in shape of the measurement wavefront effected by the encounter with the test object and the reshaping of the measurement wavefront maintains the shape of the measurement wavefront within the limited range of wavefront shapes measurable by the wavefront sensor.

11. The method of claim 1 wherein the step of reshaping the measurement wavefront into the aspheric form with a variable optical aberrator includes evaluating whether the measurement wavefront is within the capture range of the wavefront-measuring gauge and further reshaping the measurement wavefront to restore the measurement wavefront within the capture range of the wavefront-measuring gauge.

12. The method of claim 1 wherein the step of associating a wavefront propagator with a physical test object in a plurality of different relationships includes relatively moving an axis of the wavefront propagator with respect to an axis of the physical test object through a plurality of off-axis positions.

13. The method of claim 12 wherein the step of reshaping the measurement wavefront with the variable optical aberrator includes changing the measurement wavefront to include at least one of astigmatism, coma, and trefoil.

14. A method of assembling a composite measurement of a physical test object from a plurality of partially overlapping measurements of the test object comprising steps of:

acquiring a plurality of partially overlapping data maps measuring a physical property of the test object from a test wavefront that encounters the test object, each data map being extracted from a shape of the test wavefront referenced against a datum;

relatively changing the shape of the test wavefront into an aspheric form with respect to the datum independently of the test object between acquisitions of a limited number of the data maps to reduce differences between the shape of the test wavefront and the datum, including relatively changing the shape of the measurement wavefront to include at least one of astigmatism, coma, and trefoil;

evaluating overlapping regions of the data maps to characterize the relative change in the wavefront shape between acquisitions of the data maps; and

modifying the data maps in accordance with the characterization of the relative change in the wavefront shape between measurements for assembling the partially overlapping data maps into a composite data map.

15. The method of claim 14 including a step of assembling the partially overlapping data maps into the composite data map and displaying the composite data map as an external representation of the test object.

16. The method of claim 14 including a step of estimating changes in the shape of the test wavefront effected by the encounters of the test wavefront with the test object and the step of relatively changing the shape of the test wavefront into the aspheric form with respect to the datum includes counteracting at least part of the estimated changes in the shape of the test wavefront to reduce the differences between the shape of the test wavefront and the datum.

17. The method of claim 16 including a step of estimating the change in the relative shape of the test wavefront with respect to the datum effected by the step of relatively changing the shape of the test wavefront into the aspheric form with respect to the datum, and the step of evaluating overlapping regions of the data maps includes distinguishing between the estimated change in the relative shape of the test wavefront with respect to the datum and an actual change in the relative shape of the test wavefront with respect to the datum for characterizing a systematic error in the data maps.

18. The method of claim 17 including a step of assembling the partially overlapping data maps into the composite data map while suppressing influence of the systematic error in the data maps associated with the relative change in the shape of the test wavefront with respect to the datum on the composite data map.

19. The method of claim 18 wherein the step of evaluating includes defining compensators to account at least in part for differences between the estimated change in the relative shape of the test wavefront with respect to the datum and the actual change in the relative shape of the test wavefront with respect to the datum.

20. The method of claim 19 wherein the compensators include partially interlocked compensators and including steps of maintaining the shape of the test wavefront with respect to the datum between acquisitions of a limited number of the data maps, and constraining the partially interlocked compensators to acquire a substantially common value over a set of the data maps acquired while maintaining the shape of the test wavefront with respect to the datum.

21. The method of claim 14 wherein the compensators include partially interlocked compensators and the step of evaluating includes defining the partially interlocked compensators to account at least in part for the relative change in the shape of the test wavefront with respect to the datum, and constraining the partially interlocked compensators to acquire a substantially common value for a given relative change in the shape of the test wavefront with respect to the datum.

22. The method of claim 21 including steps of

incorporating compensators in an operation for assembling the partially overlapping data maps into a composite data map,

assembling the partially overlapping data maps into the composite data map, and

displaying the composite data map as an external representation of the test object.

23. A method of assembling a composite measurement of a physical test object from a plurality of subaperture measurements of the test object comprising steps of:

generating an optical measurement wavefront,

propagating the measurement wavefront through encounters with both a variable optical aberrator and the physical test object en route to a wavefront-measuring gauge having a limited capture range of wavefront shapes;

stepping an axis of an optical wavefront propagator relative to an axis of the physical test object through a succession of off-axis positions between the wavefront propagator and the test object, the wavefront propagator being arranged for conveying the measurement wavefront to the test object;

adjusting the variable optical aberrator between a limited number of the off-axis positions for maintaining the shape of the measurement wavefront within the capture range of the wavefront-measuring gauge;

collecting partially overlapping subaperture measurements of the test object with the wavefront-measuring gauge at the succession of off-axis positions;

modeling effects of the variable optical aberrator on the subaperture measurements;

evaluating mismatched measurements within overlapping portions of subaperture measurements to further characterize effects of the variable optical aberrator on the subaperture measurements, including changing values of variables within the model to reduce the mismatched measurements within overlapping portions of subaperture measurements; and

stitching the subaperture measurements of the test object together into a composite measurement while discounting the characterized effects of the variable optical aberrator on the subaperture measurements.

24. The method of claim 23 in which the step of stepping includes relatively rotating the axis of the wavefront propagator about the axis of the test object for collecting a set of radial subaperture measurements of the test object, and including a step of maintaining the variable optical aberrator at a fixed setting between the common radial subaperture measurements.

25. The method of claim 24 in which the step of evaluating includes constraining at least some of the variables within the model to include substantially common values for each of the common radial subaperture measurements.

26. The method of claim 23 in which the steps of evaluating and stitching include incorporating compensators in an operation for assembling the partially overlapping subaperture measurements into the composite measurement, and including a step of acquiring values in the operation for reducing differences between the overlapping portions of the subaperture measurements that are at least partially attributable to the variable optical aberrator.

27. The method of claim 26 wherein

(a) the variable optical aberrator is adjustable through a range of settings for reshaping the measurement wavefront,

(b) the compensators have both an amplitude and a functional form that defines a change in the shape of the measurement wavefront that is scalable by the amplitude,

(c) the compensators include partially interlocked compensators, and

(d) the step of acquiring values in the operation includes acquiring values for the partially interlocked compensators having a substantially common amplitude over a set of measurements taken at the same setting of the variable optical aberrator.

28. The method of claim 27 wherein the step of acquiring values in the operation includes acquiring values for the partially interlocked compensators having a different substantially common amplitude over a different set of the measurements taken at a different setting of the variable optical aberrator.

29. The method of claim 23 wherein

the wavefront-measuring gauge includes an interferometer,

the measurement wavefront includes a test wavefront and a reference wavefront,

the step of collecting partially overlapping subaperture measurements of the test object includes propagating the test wavefront into an encounter with the test object and comparing a change in shape of the test wavefront as effected by the encounter with the test object against the reference wavefront, and

the step of adjusting the variable optical aberrator includes changing the shape of at least one of the test wavefront and the reference wavefront to reduce differences between the test and reference wavefronts.

30. The method of claim 23 wherein the wavefront-measuring gauge includes

a wavefront sensor for measuring a limited range of wavefront shapes within the capture range of the wavefront-measuring gauge, and

a wavefront generator that generates the measurement wavefront in a shape that is within the limited range of wavefront shapes measurable by the wavefront sensor.