Method of making a multi-lobed nozzle
First Claim
Patent Images
1. A method of forming a multi-lobed nozzle, the method comprising the steps of:
- providing a substrate;
providing a nozzle plate over the substrate;
forming a multi-lobed opening in the nozzle plate;
forming a heater on the substrate below the multi-lobed opening in the nozzle plate;
forming a fluid chamber between the multi-lobed opening in the nozzle plate and the heater; and
wherein the step of forming a multi-lobed opening comprises;
providing a mask including a multi-lobed pattern;
transmitting light through the mask toward the nozzle plate; and
performing an alignment to align the multi-lobed pattern with the heater.
10 Assignments
0 Petitions
Accused Products
Abstract
A method of forming a multi-lobed nozzle in a nozzle plate. A mask may be used to pattern photoresist on the nozzle plate or for patterning a polymer dry film, for example, which is then used for etching the plate to form multi-lobed nozzles. The formed nozzle plate is disposed over a substrate having a chamber for fluid formed therein and the chamber may include walls for supporting the nozzle plate. The fluid chamber includes a heater over the substrate for ejecting fluid through the nozzle via rapid heating of the fluid. Continuous supply of fluid is provided by forming a fluid supply channel in communication with the fluid chamber.
-
Citations
18 Claims
-
1. A method of forming a multi-lobed nozzle, the method comprising the steps of:
-
providing a substrate; providing a nozzle plate over the substrate; forming a multi-lobed opening in the nozzle plate; forming a heater on the substrate below the multi-lobed opening in the nozzle plate; forming a fluid chamber between the multi-lobed opening in the nozzle plate and the heater; and wherein the step of forming a multi-lobed opening comprises; providing a mask including a multi-lobed pattern; transmitting light through the mask toward the nozzle plate; and performing an alignment to align the multi-lobed pattern with the heater. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
-
Specification