×

Method of making a multi-lobed nozzle

  • US 8,205,338 B2
  • Filed: 08/20/2009
  • Issued: 06/26/2012
  • Est. Priority Date: 08/20/2009
  • Status: Active Grant
First Claim
Patent Images

1. A method of forming a multi-lobed nozzle, the method comprising the steps of:

  • providing a substrate;

    providing a nozzle plate over the substrate;

    forming a multi-lobed opening in the nozzle plate;

    forming a heater on the substrate below the multi-lobed opening in the nozzle plate;

    forming a fluid chamber between the multi-lobed opening in the nozzle plate and the heater; and

    wherein the step of forming a multi-lobed opening comprises;

    providing a mask including a multi-lobed pattern;

    transmitting light through the mask toward the nozzle plate; and

    performing an alignment to align the multi-lobed pattern with the heater.

View all claims
  • 10 Assignments
Timeline View
Assignment View
    ×
    ×