Methods and apparatus for sealing a chamber

• US 8,206,075 B2
• Filed: 06/02/2005
• Issued: 06/26/2012
• Est. Priority Date: 06/02/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: White, John M., Kurita, Shinichi, Sterling, William N., Tanase, Yoshiaki
• Primary Examiner(s): Gehman, Bryon P.
• Assistant Examiner(s): Braden, Shawn
• Application Number:
  US11/145,018
• Publication Number:
  US 20050285992A1
• Time in Patent Office: 2,581 Days
• Field of Search: 220/810, 414/217, 414/939, 118/724, 118/219, 118/719, 118/733, 219/390
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber

Abstract

In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the sealing surface adapted to input or output a substrate. The body further includes a plurality of side walls. The load lock chamber also includes a top coupled to the body. The top includes one or more openings that divide the top into a first portion and a second portion. The load lock chamber further includes one or more top sealing members adapted to cover each opening of the top. Each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top. Numerous other aspects are provided.

Claims

1. A load lock chamber comprising:

a body having;

at least one sealing surface wall including a sealing surface, the sealing surface wall having an opening adjacent the sealing surface adapted to input or output a substrate; and

a plurality of side walls;

a top member coupled to the body, wherein the top member includes one or more elongated slots that extend through an entire thickness of the top member and divide the top member into a first portion and a second portion;

one or more top sealing members adapted to cover each elongated slot in the top member, wherein each top sealing member absorbs a lateral movement of the first portion of the top member along a longitudinal dimension of the top member relative to the second portion of the top member; and

a load lock door adapted to close and seal the opening in the sealing surface wall of the body,

wherein the load lock door includes a sealing member adapted to contact and seal against the sealing surface of the sealing surface wall, and

wherein the first portion of the top member contacts the sealing surface wall.

2. The load lock chamber of claim 1 wherein the one or more top sealing members reduce movement of the first portion of the top member and the sealing surface wall so as to reduce wear of the sealing member of the load lock door.

3. The load lock chamber of claim 1 wherein the load lock door is adapted to move with the sealing surface wall.

4. The load lock chamber of claim 1 wherein the one or more elongated slots in the top member are oval-shaped.

5. The load lock chamber of claim 1 wherein the top member includes:

a frame; and

an insert positioned within the frame.

6. The load lock chamber of claim 5 wherein the frame comprises stainless steel and the insert comprises aluminum.

7. The load lock chamber of claim 5 wherein the one or more slots in the top member are formed within the frame.

8. The load lock chamber of claim 1 further comprising:

a bottom coupled to the body, wherein the bottom includes one or more elongated slots that divide the bottom into a first portion and a second portion; and

one or more bottom sealing members adapted to cover each elongated slot in the bottom, wherein each bottom sealing member absorbs a movement of the first portion of the bottom relative to the second portion of the bottom.

9. The load lock chamber of claim 8 wherein:

the first portion of the bottom contacts the sealing surface wall.

10. The load lock chamber of claim 9 wherein the one or more bottom sealing members reduce movement of the first portion of the bottom and the sealing surface wall so as to reduce wear of the sealing member of the load lock door.

11. The load lock chamber of claim 8 wherein the one or more elongated slots in the bottom are oval-shaped.

12. The load lock chamber of claim 8 wherein the bottom includes:

a frame; and

an insert positioned within the frame.

13. The load lock chamber of claim 12 wherein the frame comprises stainless steel and the insert comprises aluminum.

14. The load lock chamber of claim 12 wherein the one or more elongated slots in the bottom are formed within the frame.

15. The load lock chamber of claim 1 wherein each top sealing member comprises a flexible gap sealing member, and a support member that holds the flexible gap sealing member against the top member to cover each of said elongated slots.

16. The load lock chamber of claim 15, wherein the support member comprises a stainless steel retaining plate.