Optically transparent wires for secure circuits and methods of making same
First Claim
1. A structure, comprising:
- a dielectric layer on an integrated circuit substrate said substrate including semiconductor devices, said dielectric layer having a bottom surface closet to said substrate and an opposite top surface furthest from said substrate;
electrically conductive first and second wires in said dielectric layer, top surfaces of said first and second wires coplanar with a top surface of said dielectric layer; and
an electrically conductive and patterned third wire on said top surface of said dielectric layer and on said top surfaces of said first and second wires, said third wire electrically contacting each of said first and second wires, said third wire not detectable by optical microscopy.
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Accused Products
Abstract
A structure and a method. The method includes: forming a dielectric layer on a substrate; forming electrically conductive first and second wires in the dielectric layer, top surfaces of the first and second wires coplanar with a top surface of the dielectric layer; and either (i) forming an electrically conductive third wire on the top surface of the dielectric layer, and over the top surfaces of the first and second wires, the third wire electrically contacting each of the first and second wires, the third wire not detectable by optical microscopy or (ii) forming an electrically conductive third wire between the top surface of the dielectric layer and the substrate, the third wire electrically contacting each of the first and second wires, the third wire not detectable by optical microscopy.
17 Citations
14 Claims
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1. A structure, comprising:
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a dielectric layer on an integrated circuit substrate said substrate including semiconductor devices, said dielectric layer having a bottom surface closet to said substrate and an opposite top surface furthest from said substrate; electrically conductive first and second wires in said dielectric layer, top surfaces of said first and second wires coplanar with a top surface of said dielectric layer; and an electrically conductive and patterned third wire on said top surface of said dielectric layer and on said top surfaces of said first and second wires, said third wire electrically contacting each of said first and second wires, said third wire not detectable by optical microscopy. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A structure, comprising:
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a dielectric layer on an integrated circuit substrate, said substrate including semiconductor devices, said dielectric layer having a bottom surface closet to said substrate and an opposite top surface furthest from said substrate; an electrically conductive first and second wires in said dielectric layer, top surfaces of said first and second wires coplanar with a top surface of said dielectric layer; and an electrically conductive and patterned third wire, said third wire formed in said dielectric layer, said third wire electrically contacting each of said first and second wires, said third wire not detectable by optical microscopy. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A structure, comprising:
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a dielectric layer on substrate; electrically conductive first and second wires in said dielectric layer, top surfaces of said first and second wires coplanar with a top surface of said dielectric layer; an electrically conductive third wire on said top surface of said dielectric layer and over said top surfaces of said first and second wires, said third wire electrically contacting each of said first and second wires, said third wire not detectable by optical microscopy; and wherein said first wire includes an electrically conductive first diffusion barrier layer and said second wire includes an electrically conductive second diffusion barrier layer, top surfaces of said first and second wires being coextensive with respective top surfaces of said first and second diffusion barrier layers and wherein said third wire abuts said top surfaces of said first and second diffusion barrier layers.
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14. A structure, comprising:
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a dielectric layer on a substrate; an electrically conductive first and second wires in said dielectric layer, top surfaces of said first and second wires coplanar with a top surface of said dielectric layer; an electrically conductive third wire between said top surface of said dielectric layer and said substrate, said third wire electrically contacting each of said first and second wires, said third wire not detectable by optical microscopy; and wherein said first wire includes an electrically conductive first diffusion barrier layer and said second wire includes an electrically conductive second diffusion barrier layer, top surfaces of said first and second wires being coextensive with respective top surfaces of said first and second diffusion barrier layers and wherein said third wire abuts said top surfaces of said first and second diffusion barrier layers.
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Specification