Sensor system and method for operating a sensor system
First Claim
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1. A sensor system comprising:
- a first sensor including a first seismic mass having a first resonance frequency;
a second sensor including a second seismic mass having a second resonance frequency, the first resonance frequency being unequal to the second resonance frequency; and
an analyzer circuit for analyzing a first output signal of the first sensor and a second output signal of the second sensor,wherein the first sensor and the second sensor are situated on a shared sensor element, whereinthe first sensor has first actuating means for exciting the first seismic mass having the first resonance frequency and the second sensor has second actuating means for exciting the second seismic mass having the second resonance frequency.
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Abstract
A sensor system includes a first sensor, a second sensor, and an analyzer circuit, the first sensor including a first seismic mass having a first resonance frequency and the second sensor including a second seismic mass having a second resonance frequency, and the analyzer circuit being provided for analyzing a first output signal of the first sensor as well as a second output signal of the second sensor and, moreover, the first resonance frequency being unequal to the second resonance frequency.
3 Citations
11 Claims
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1. A sensor system comprising:
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a first sensor including a first seismic mass having a first resonance frequency; a second sensor including a second seismic mass having a second resonance frequency, the first resonance frequency being unequal to the second resonance frequency; and an analyzer circuit for analyzing a first output signal of the first sensor and a second output signal of the second sensor, wherein the first sensor and the second sensor are situated on a shared sensor element, wherein the first sensor has first actuating means for exciting the first seismic mass having the first resonance frequency and the second sensor has second actuating means for exciting the second seismic mass having the second resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A sensor system comprising:
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a first sensor including a first seismic mass having a first resonance frequency; a second sensor including a second seismic mass having a second resonance frequency, the first resonance frequency being unequal to the second resonance frequency; and an analyzer circuit for analyzing a first output signal of the first sensor and a second output signal of the second sensor, wherein the first sensor has first detection means for detecting a first capacitance change, the first capacitance change being a function of a first deflection of the first seismic mass due to a first Coriolis acceleration of the first seismic mass, the second sensor having second detection means for detecting a second capacitance change, the second capacitance change being a function of a second deflection of the second seismic mass due to a second Coriolis acceleration of the second seismic mass, the first capacitance change having a first frequency which is substantially identical to the first resonance frequency and the second capacitance change having a second frequency which is substantially identical to the second resonance frequency.
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8. A method for operating a sensor system including a first sensor and a second sensor, the first sensor having a first seismic mass and the second sensor having a second seismic mass, the first sensor and the second sensor situated on a shared sensor element, the method comprising:
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exciting the first seismic mass to a first oscillation having a first resonance frequency with the aid of a first actuating device; and exciting the second seismic mass, with the aid of a second actuating device, to a second oscillation having a second resonance frequency which is unequal to the first resonance frequency, wherein the second seismic mass is excited to a second oscillation in such a way that the second resonance frequency is unequal to a multiple of the first resonance frequency.
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9. A method for operating a sensor system including a first sensor and a second sensor, the first sensor having a first seismic mass and the second sensor having a second seismic mass, the method comprising:
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exciting the first seismic mass to a first oscillation having a first resonance frequency with the aid of a first actuating device; exciting the second seismic mass, with the aid of a second actuating device, to a second oscillation having a second resonance frequency which is unequal to the first resonance frequency; measuring a first capacitance change, having substantially the first resonance frequency, using a first detection device, the first capacitance change being a function of a first deflection of the first seismic mass due to a first Coriolis acceleration of the first seismic mass; and measuring a second capacitance change, having substantially the second resonance frequency, using a second detection device, the second capacitance change being a function of a second deflection of the second seismic mass due to a second Coriolis acceleration of the second seismic mass. - View Dependent Claims (10, 11)
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Specification