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Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method

  • US 8,208,128 B2
  • Filed: 02/06/2009
  • Issued: 06/26/2012
  • Est. Priority Date: 02/08/2008
  • Status: Active Grant
First Claim
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1. A position measuring system that measures positional information of a movable body that moves along a predetermined plane including a first axis and a second axis that are orthogonal to each other, the system comprising:

  • a first fixed grating and a second fixed grating that are respectively arranged external to the movable body so as to extend in a direction parallel to the first axis, the first fixed grating having its periodic direction in the direction parallel to the first axis and the second fixed grating having its periodic direction in a direction parallel to the second axis;

    an optical member that has a first moving grating and a second moving grating and is attached to the movable body, the first and second moving gratings having their periodic directions in directions corresponding to the periodic directions of the first fixed grating and the second fixed grating respectively; and

    a first photodetection system and a second photodetection system that correspond to the first and second fixed gratings respectively, wherebya first measurement device that measures positional information of the movable body in the direction parallel to the first axis is configured including the first fixed grating, the first moving grating and the first photodetection system, anda second measurement device that measures positional information of the movable body in the direction parallel to the second axis is configured including the second fixed grating, the second moving grating and the second photodetection system, whereina first measurement beam and a second measurement beam, which reach the optical member, are irradiated on the first moving grating and the second moving grating, respectively, the first measurement beam and the second measurement beam reaching the optical member along a first optical path and a second optical path that are parallel to the first axis and correspond to the first fixed grating and the second fixed grating, respectively.

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