MEMS device with independent rotation in two axes of rotation
First Claim
Patent Images
1. A MEMS arrangement comprising:
- a top plane comprising a rotatable element;
a middle support frame plane,a lower electrical substrate plane;
wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation;
wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation;
wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation;
wherein the MEMS arrangement is configured as a 1×
N array with fill-factor >
90%.
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Abstract
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
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Citations
28 Claims
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1. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; wherein the MEMS arrangement is configured as a 1×
N array with fill-factor >
90%. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; further comprising; actuating electrodes disposed between the rotatable element and the support frame; where rotation around the first axis is achieved by the actuating electrodes disposed between the rotatable element and the middle support frame; further comprising; actuating electrodes disposed between the support frame and the lower electrical substrate; where rotation around the second axis is achieved by the actuating electrodes disposed between the support frame and the lower electrical substrate. - View Dependent Claims (9)
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10. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; where the middle support frame plane comprises an upper conductive layer and a lower conductive layer separated by an insulating layer. - View Dependent Claims (11, 12, 13, 14)
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15. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; wherein; the support frame is formed in the middle support frame plane from a conductive layer; trenches formed in the conductive layer are filled with insulating material to form regions of the support frame that are electrically isolated from each other. - View Dependent Claims (16)
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17. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; further comprising; flexible hinges providing rotation around the first axis formed in the top plane and disposed at opposing ends of the rotatable element along the first axis. - View Dependent Claims (18)
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19. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; flexible hinges providing rotation around the first axis formed in the middle frame layer plane and connected to opposing ends of the rotatable element along the first axis; wherein the flexible hinges are substantially covered by the rotatable element; and
wherein the MEMS arrangement is configured as a 1×
N array with fill-factor >
90%.
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20. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; flexible hinges providing rotation around the second axis formed in the middle support frame plane; wherein the flexible hinges providing rotation about the second axis are disposed underneath the rotatable element to allow high fill-factor and maximum usable rotatable element surface area; and
wherein the MEMS arrangement is configured as a 1×
N array with fill-factor >
90%.
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21. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; further comprising; a first drive voltage source that produces a first drive voltage for driving rotation in the first axis of rotation; a second drive voltage source that produces a second drive voltage for driving rotation in the second axis of rotation; wherein first drive voltage is substantially lower than the second drive voltage. - View Dependent Claims (22)
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23. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; further comprising; through-wafer electrical vias in the lower electrical substrate to reduce the space needed for electrical routing. - View Dependent Claims (24, 25, 26)
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27. A MEMS arrangement comprising:
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a top plane comprising a rotatable element; a middle support frame plane, a lower electrical substrate plane; wherein the rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the middle support frame in a first axis of rotation; wherein the frame is mounted so as to be rotatable with respect to a second axis of rotation; wherein rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation; further comprising; a plurality of paths for delivery of control voltages; a shielding element that performs some shielding between the paths for delivery of control voltages and both the support frame and the rotatable element. - View Dependent Claims (28)
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Specification